阿克塞利斯科技公司
MX ˙ BMV ˙ US0545402085
SecurityMX:ACLS / Axcelis Technologies, Inc.
InstitutionRoyce & Associates Lp
ManagerChuck Royce
Latest Disclosed Ownership125,280 shares
Latest Disclosed Value $ 11,661,062
Royce & Associates Lp reports 7.65% increase in ownership of ACLS / Axcelis Technologies, Inc.

On May 12, 2026 - Royce & Associates Lp filed a 13F-HR form disclosing ownership of 125,280 shares of Axcelis Technologies, Inc. (MX:ACLS) valued at $11,661,062 USD as of March 31, 2026. The entity filed a previous 13F-HR on February 9, 2026 disclosing 116,375 shares of Axcelis Technologies, Inc.. This represents a change in shares of 7.65% during the quarter.

Institutional Ownership: 13F and NPORT Filings

The Security and Class in the table below are shown exactly as filed by the investor. We do our best to track continuity of investments through acquisitions, and this will be reflected in the table as changes in names. In addition to descriptive data, performance of the investment is shown over time. To calculate quarterly performance, we first calculate cost basis of the shares purchased during the quarter, then use that to calculate gross profit. Quarterly return is Gross Profit / Starting Portfolio value.

Note that cost basis is calculated and stored in thousands, so small quarterly changes in shares frequently result in a cost basis of zero.

Upgrade to unlock premium data and export to Excel .

Disclosed Equity Positions (from 13F/NPORT Filings)
File
Date
Effective
Date
Form Security Class ID Avg Price
Paid (Est)
Reported
Shares
ΔShares ΔShares
(%)
Reported
Value
(x1000)
ΔValue
(%)
Alloc
(%)
ΔAlloc ΔAlloc (%) Cost Basis
(x1000)
Unrealized
Gain/Loss
(x1000)
2026-05-12 2026-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 125,280 8,905 7.65 11,661 24.73 0.1151
2026-02-09 2025-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 116,375 -28,333 -19.58 9,350 -33.83 0.0948
2025-11-12 2025-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 144,708 -120,330 -45.40 14,129 -23.50 0.1409
2025-08-11 2025-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 265,038 -15,945 -5.67 18,470 32.34 0.1896
2025-05-06 2025-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 280,983 -52,443 -15.73 13,956 -40.09 0.1513
2025-02-10 2024-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 333,426 59,755 21.83 23,296 -18.81 0.2161
2024-11-06 2024-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 273,671 167,235 157.12 28,694 89.60 0.2608
2024-08-13 2024-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 106,436 41,311 63.43 15,134 108.40 0.1415
2024-05-13 2024-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 65,125 -5,971 -8.40 7,263 -21.24 0.0648
2024-02-12 2023-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 71,096 -14,676 -17.11 9,220 -34.07 0.0852
2023-11-09 2023-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 85,772 -13,879 -13.93 13,985 -23.45 0.1424
2023-08-07 2023-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 99,651 -54,924 -35.53 18,269 -11.30 0.1774
2023-05-23 2023-03-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 154,575 -69,977 -31.16 20,597 15.58 0.2062
2023-05-04 2023-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 154,575 -69,977 21 0.2062
2023-05-23 2022-12-31 13F/A-1 AXCELIS TECHNOLOGIES COM NEW 054540208 224,552 20,563 10.08 17,820 44.24 0.1873
2023-02-13 2022-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 224,552 20,563 18 0.1863
2022-11-03 2022-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 203,989 32,683 19.08 12,354 31.51 0.1397
2022-08-04 2022-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 171,306 55,934 48.48 9,394 7.80 0.0967
2022-05-05 2022-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 115,372 -71,020 -38.10 8,714 -37.30 0.0740
2022-02-07 2021-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 186,392 -491,373 -72.50 13,897 -56.40 0.1038
2021-11-10 2021-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 677,765 -271,550 -28.60 31,875 -16.93 0.2384
2021-08-06 2021-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 949,315 -58,161 -5.77 38,371 -7.31 0.2637
2021-05-10 2021-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 1,007,476 -68,340 -6.35 41,397 32.14 0.2783
2021-02-08 2020-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 1,075,816 104,400 10.75 31,328 46.59 0.2589
2020-11-12 2020-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 971,416 303,400 45.42 21,371 14.87 0.2307
2020-08-07 2020-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 668,016 -263,754 -28.31 18,604 9.04 0.2049
2020-05-12 2020-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 931,770 -25,400 -2.65 17,061 -26.02 0.2325
2020-02-06 2019-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 957,170 131,120 15.87 23,063 63.37 0.2060
2019-11-13 2019-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 826,050 191,750 30.23 14,117 47.88 0.1307
2019-08-12 2019-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 634,300 -79,400 -11.13 9,546 -33.52 0.0863
2019-05-09 2019-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 713,700 -127,800 -15.19 14,360 -4.13 0.1213
2019-02-11 2018-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 841,500 841,500 14,979 0.1343
2017-08-07 2017-06-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 0 -130,046 -100.00 0 -100.00
2017-05-11 2017-03-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 130,046 -50,000 -27.77 2,445 -6.68 0.0160
2017-02-10 2016-12-31 13F AXCELIS TECHNOLOGIES COM NEW 054540208 180,046 -52,000 -22.41 2,620 -14.99 0.0168
2016-11-14 2016-09-30 13F AXCELIS TECHNOLOGIES COM NEW 054540208 232,046 -1,405,642 -85.83 3,082 -30.03 0.0203
2016-08-08 2016-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 1,637,688 -1,614,200 -49.64 4,405 -51.62 0.0291
2016-05-11 2016-03-31 13F AXCELIS TECHNOLOGIES COM 054540109 3,251,888 -647,207 -16.60 9,105 -9.84 0.0575
2016-02-09 2015-12-31 13F AXCELIS TECHNOLOGIES COM 054540109 3,899,095 1,125,400 40.57 10,099 36.36 0.0603
2015-11-12 2015-09-30 13F AXCELIS TECHNOLOGIES COM 054540109 2,773,695 797,200 40.33 7,406 26.60 0.0393
2015-08-10 2015-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 1,976,495 -110,000 -5.27 5,850 17.80 0.0247
2015-05-13 2015-03-31 13F AXCELIS TECHNOLOGIES COM 054540109 2,086,495 -122,500 -5.55 4,966 -12.18 0.0188
2015-02-09 2014-12-31 13F AXCELIS TECHNOLOGIES COM 054540109 2,208,995 -9,900 -0.45 5,655 28.06 0.0196
2014-11-12 2014-09-30 13F AXCELIS TECHNOLOGIES COM 054540109 2,218,895 0 0.00 4,416 -0.50 0.0149
2014-08-11 2014-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 2,218,895 87,500 4.11 4,438 -3.14 0.0132
2014-05-12 2014-03-31 13F AXCELIS TECHNOLOGIES COM 054540109 2,131,395 174,901 8.94 4,582 -4.02 0.0135
2014-02-10 2013-12-31 13F AXCELIS TECHNOLOGIES COM 054540109 1,956,494 190,000 10.76 4,774 28.09 0.0137
2013-11-12 2013-09-30 13F AXCELIS TECHNOLOGIES COM 054540109 1,766,494 175,000 11.00 3,727 28.65 0.0111
2013-08-07 2013-06-30 13F AXCELIS TECHNOLOGIES COM 054540109 1,591,494 1,591,494 2,897 0.0089
Legend
Shares
The total number of shares held by the institution at the end of the reporting period (the effective date). This is provided in the filing.
Value
The total value of the shares as of the effective date. This is provided in the filing.
Avg. Share Price
The weighted average share price of the shares held by the institution. We use FIFO accounting to determine this price
Class
This is the security class as indicated by the filer. There are a variety of values for this field. Common values include "EC" = equity common, "EP" - equity preferred
Allocation (%)
The percent of the institution's portfolio that this position represents. This is provided in NPORT filings. For 13F filings, we calculate it.
Change in Allocation
The change in allocation from the prior reporting period. This is calculated as current allocation - prior allocation.
Change in Allocation (%)
The percent change in allocation from the prior reporting period. This is calculated as (current allocation - prior allocation) / prior allocation.
Cost Basis
The total cost of the shares held. This is calculated as reported shares * avg. share price
Unrealized Gain/Loss
This is the market value of the position as of the effective date minus the cost basis.