ONTO Insider Trading - Onto Innovation Inc.

已發行股份	49,743,567 shares
內部人士股份	8,587,064 shares
內部持股	17.26 %
所有內部人士	62

內部人士情緒分數

「內部人士情緒分數」用於查找被公司內部人士購入的公司。

它是一個複雜的多因素量化模型的結果，該模型能夠辨識具有最高內部人士累積持有水平的公司。該評分模型結合了內部人士在過去90天內購買的淨數量、總購買股份佔流通股比例，以及內部人士擁有的總股份的指標。該分數的範圍從0到100，數值越高表示相對於同行業而言具有更高程度的內部人士持股水平，50為平均值。

更新頻率：每日

查閱「內部人士首選」，該清單呈現被內部人士購入最多的公司。

查閲高排名股票

高管情緒分數

「高管情緒分數」用於查找被公司管理層購入的公司。

根據定義，公司高管是公司內部人士，但與其他內部人士（10%的股東和董事會成員）不同，公司高管每天在公司工作，而且他們使用自己的資金進行交易。（10%的股東和董事會成員通常是基金經理，管理著其他人的資金。）因此，公司高管進行的內幕交易更為重要性，應該被適當地重視和關注。

如同「內部人士情緒分數」，「高管情緒分數」也是一個複雜的多因素量化模型的計算結果，該模型能夠辨識具有最高高管累積持有水平的公司。

更新頻率：每日

查閱「內部人士首選」，該清單呈現被內部人士購入最多的公司。

查閲高排名股票

關鍵內部人士指標

此表格顯示了公司在各種內部人士指標上的排名。百分位數排名顯示了這家公司在美國市場與其他公司相比的表現。排名越高表明公司所處狀況越好。

舉例來說，一般認為內部人士的買入是一個積極的指標，因此具有更多內部人士買入的公司將排名高於那些內部人士買入較少（甚至有內部人士賣出）的公司。

內部人士買入淨數（排名）

0 ( )

6350 out of 10948

內部人士買入淨數是過去90天內買入的內部人士總數減去賣出的內部人士總數。以百分位排名顯示（範圍從0到100%）。

內部人士買入佔流通股比例（排名）

0.000% ( )

6260 out of 10786

內部人士買入佔流通股比例是內部人士在過去90天內購買的股份總數減去賣出的股份總數，除以總流通股數並乘以100。

內幕交易圖表

以下圖表顯示了Onto Innovation Inc.內部人士交易。內部人士包括公司的高管、董事或重要投資者。一般而言，基於內幕、非公開信息進行交易是非法的。這並不意味著他們在自己的公司進行任何交易都是非法的。但是，他們必須透過Form 4向美國證券交易委員會（SEC）報告所有交易。

內部人員名單及盈利指標

這張表格顯示已知的內部人員名單，從向SEC披露的申報文件中自動生成。除了姓名、最近的職稱和董事、高管或10%擁有人的標誌外，我們還提供了最新披露的持股信息。此外，我們盡可能提供內部人的歷史交易表現。歷史交易表現是內部人士實際進行的公開市場購買交易表現的加權平均值。有關此計算方式的更多資訊，請查看YouTube網絡研討會。

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內部人士	持股數量	分拆調整
Jeff Andreson Chief Financial Officer - [O]	71,919	71,919
Aukerman Jeffrey A. Director - [D]	8,097	8,097
Howard A Iii Bain Director - [D]	24,578	24,578
J Thomas Bentley Director - [D]	71,612	71,612
Leo Berlinghieri Director - [D]	20,210	20,210
D Mayson Brooks Vice President & GM, IBU - [O]	3,025	3,025
James Barnhart SVP, Business Operations - [O]	27,046	27,046
Borowicz Stanislaw M. EVP, Business Operations - [O]	36,934	36,934
Edward J Jr Brown Director - [D]	44,739	44,739
Stella N Coates 10% Owner - [10%]	3,501,511	3,501,511
Vincent J Coates Chairman of the Board and Sec., Director, 10% Owner - [D] [O] [10%]	3,457,686	3,457,686
Vita A Cassese Director - [D]	11,233	11,233
Chun Hoy Chan -	24,339	24,339
Shirley Chen SVP Customer Success - [O]	15,517	15,517
Jonathan Chou Chief Financial Officer - [O]	34,741	34,741
Norman V Coates Director - [D]	5,822	5,822
Bruce A Crawford Chief Operating Officer - [O]	52,998	52,998
Robert G Deuster Director - [D]	17,276	17,276
Ido Dolev EVP, Prod Solutions Grp - [O]	26,536	26,536
Joseph F Dox Director - [D]	1,221	1,221

內部人士	持股數量	分拆調整
Nancy E Egan General Counsel - [O]	26,590	26,590
Robert Fiordalice SVP & GM, Metrology BU - [O]	8,763	8,763
Barry Hartunian -	3,058	3,058
James Harlow Chief Operating Officer - [O]	8,586	8,586
Kevin Heidrich -	20,470	20,470
Dean Iacopetti -	5,338	5,338
Ju Jin SVP & GM, IBU - [O]	10,254	10,254
Ronald W Kisling Chief Financial Officer - [O]	38,049	38,049
Robert Alan Koch VP & General Counsel - [O]	35,689	35,689
Stephen Douglas Kelley Director - [D]	6,384	6,384
Rollin Kocher -	33,896	33,896
Leonard A LaBua -	0	0
Erich J Lehmann -	16,767	16,767
Pierre-Yves Lesaicherre -	108,564	108,564
Susan D Lynch Director - [D]	3,684	3,684
David Brian Miller Director - [D]	12,692	12,692
George C Murray -	0	0
Stephen G Newberry Director - [D]	17,588	17,588
Yoon Ah OH SVP, Gen Counsel & Corp Sec - [O]	21,110	21,110
William G Oldham Director - [D]	28,858	28,858
Michael P Plisinski Chief Executive Officer, Director - [D] [O]	179,242	179,242

內部人士	持股數量	分拆調整
Brian K Roberts Chief Financial Officer - [O]	24,271	24,271
Karen M Rogge Director - [D]	5,150	5,150
Steven R Roth Sr VP & CFO - [O]	23,043	23,043
Bruce C Rhine Director - [D]	3,500	3,500
Stephen S Schwartz Director - [D]	3,536	3,536
Christopher A Seams Director - [D]	38,513	38,513
Rodney Smedt -	31,998	31,998
Stephen J Smith Director - [D]	12,148	12,148
Michael Sheaffer -	0	0
Mark Slicer Chief Financial Officer - [O]	13,640	13,640
Timothy J Stultz Director - [D]	209,143	209,143
May Su Director - [D]	7,984	7,984
Greg Swyt -	11,680	11,680
Christine A Tsingos Director - [D]	42,918	42,918
Janet Therese Taylor General Counsel - [O]	30,110	30,110
Srini Vedula SVP, Customer Success - [O]	18,730	18,730
Vincent J Coates Separate Property Trust 10% Owner - [10%]	7,003,022	3,501,511
Edmond R Ward	2,500
John R Whitten Director - [D]	18,618	18,618
Ramil Yaldaei Chief Operating Officer - [O]	17,593	17,593
Silveira Elvino M da -	31,867	31,867

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追蹤內部人士買入記錄 - 短期收益分析

在這一部分，我們分析了在 ONTO / Onto Innovation Inc. 中進行的每筆非計劃的公開市場內部人士購買的盈利情況。這種分析有助於了解內部人士是否持續產生異常的回報，以及是否值得跟踪。該分析基於每筆交易後一年的情況，結果僅為理論值。 .

以下表格顯示了最近的自動交易計劃之外的公開市場購買。

交易日期	內部人士	報告股數	報告價格	經調整股數	經調整價格	成本基礎	達到最高利潤的天數	達到最高利潤時的價格	最高淨利 ($)	最高回報率（%）
2020-02-28	Jin Ju	1,000	30.0000	1,000	30.0000	30,000	357	66.2700	36,270	120.90
2007-05-09	COATES VINCENT J	100	5.8800	100	5.8800	588
2007-05-09	COATES VINCENT J	2,500	5.8700	2,500	5.8700	14,675
2007-05-09	COATES VINCENT J	900	5.8600	900	5.8600	5,274
2007-05-09	COATES VINCENT J	17,300	5.8500	17,300	5.8500	101,205
2007-05-08	COATES VINCENT J	100	5.9300	100	5.9300	593
2007-05-08	COATES VINCENT J	2,200	5.9100	2,200	5.9100	13,002
2007-05-08	COATES VINCENT J	6,000	5.9000	6,000	5.9000	35,400
2007-05-08	COATES VINCENT J	5,091	5.8900	5,091	5.8900	29,986

經調整價格已按拆股調整。經調整股數已按拆股調整。

ONTO / Onto Innovation Inc. Insider Trades

追蹤內部人士賣出記錄 - 短期虧損分析

在這一部分，我們分析了在 ONTO / Onto Innovation Inc. 中進行的每筆非計劃的公開市場內部人士賣出所達成的短期虧損規避。如果存在持續的虧損規避模式，可能表明未來的內部人士賣出交易預示著價格的下跌。該分析基於每筆交易後一年的情況，結果僅為理論值。 .

以下表格顯示了最近的自動交易計劃之外的公開市場購買。

交易日期	內部人士	報告股數	報告價格	經調整股數	經調整價格	成本基礎	達到最低利潤的天數	達到最低利潤時的價格	避免的最高損失金額($)	避免的最高損失率($)
2024-02-13	MILLER DAVID BRIAN	2,800	170.4900	2,800	170.4900	477,372	171	158.4500	-33,712	-7.06
2023-09-01	Vedula Srini	1,469	137.0000	1,469	137.0000	201,253
2023-06-15	Jin Ju	3,231	105.1700	3,231	105.1700	339,804
2023-06-05	Jin Ju	1,232	107.7200	1,232	107.7200	132,711
2023-05-23	MILLER DAVID BRIAN	1,185	99.2100	1,185	99.2100	117,564
2023-05-23	MILLER DAVID BRIAN	3,815	99.8400	3,815	99.8400	380,890
2023-05-16	Jin Ju	1,603	95.0000	1,603	95.0000	152,285
2022-02-15	Rhine Bruce C	12,172	89.0300	12,172	89.0300	1,083,673
2022-02-15	Rhine Bruce C	33,523	89.6000	33,523	89.6000	3,003,661

經調整價格已按拆股調整。經調整股數已按拆股調整。

交易歷史

點擊連結圖示即可查看完整的交易記錄。作為 10b5-1 自動交易計畫的一部分進行報告的交易，將在標記為 10b-5 的欄位中顯示 X。

呈報日期	交易日期	表格	內部人士	證券代碼	證券種類	代碼	直接	行使價格	單位價格	股數變化	價值變化 (1K)	剩餘期權	剩餘股份
2026-05-22	2026-05-20	4	Kelley Stephen Douglas	ONTO	Common Stock	A - Award	D			761			6,384
2026-05-22	2026-05-20	4	Lynch Susan D	ONTO	Common Stock	A - Award	D			761			3,684
2026-05-22	2026-05-20	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			761			12,692
2026-05-22	2026-05-20	4	SCHWARTZ STEPHEN S	ONTO	Common Stock	A - Award	D			761			3,536
2026-05-22	2026-05-20	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			761			38,513
2026-05-22	2026-05-20	4	Su May	ONTO	Common Stock	A - Award	D			761			7,984
2026-05-18	2026-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		271.7700	-625	-170		17,593
2026-05-18	2026-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		271.7700	-218	-59		18,218
2026-05-18	2026-05-15	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		271.7700	-530	-144		21,110
2026-03-04	2026-03-03	4	Dolev Ido	ONTO	Common Stock	F - Taxes	D		207.5000	-819	-170		26,536
2026-03-04	2026-03-02	4	Dolev Ido	ONTO	Common Stock	A - Award	D			3,440			27,355
2026-03-04	2026-03-02	4	ROBERTS BRIAN K	ONTO	Common Stock	A - Award	D			3,096			24,271
2026-03-04	2026-03-03	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		207.5000	-615	-128		18,436
2026-03-04	2026-03-02	4	YALDAEI RAMIL	ONTO	Common Stock	A - Award	D			7,683			19,051
2026-03-04	2026-03-03	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		207.5000	-3,742	-776		179,242
2026-03-04	2026-03-02	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			14,479			182,984
2026-03-04	2026-03-02	4	Chen Shirley	ONTO	Common Stock	A - Award	D			2,523			15,517
2026-03-04	2026-03-03	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		207.5000	-417	-87		21,640
2026-03-04	2026-03-02	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			2,408			22,057
2026-03-03	2026-03-01	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		215.8900	-276	-60		11,368
2026-03-03	2026-03-01	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		215.8900	-347	-75		11,644
2026-03-03	2026-03-01	4	YALDAEI RAMIL	ONTO	Common Stock	M - Exercise	D			649			11,991
2026-03-03	2026-03-01	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		215.8900	-1,925	-416		168,505
2026-03-03	2026-03-01	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		215.8900	-2,222	-480		170,430
2026-03-03	2026-03-01	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			4,597			172,652
2026-03-03	2026-03-01	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		215.8900	-267	-58		19,649
2026-03-03	2026-03-01	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		215.8900	-307	-66		19,916
2026-03-03	2026-03-01	4	OH Yoon Ah	ONTO	Common Stock	M - Exercise	D			724			20,223
2026-02-18	2026-02-14	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		217.2300	-3,632	-789		168,055
2026-02-18	2026-02-14	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		217.2300	-8,919	-1,937		171,687
2026-02-18	2026-02-14	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			18,445			180,606
2026-02-18	2026-02-14	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		217.2300	-501	-109		19,499
2026-02-18	2026-02-14	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		217.2300	-1,094	-238		20,000
2026-02-18	2026-02-14	4	OH Yoon Ah	ONTO	Common Stock	M - Exercise	D			3,084			21,094
2025-12-29	2025-12-24	4	Plisinski Michael P	ONTO	Common Stock	G - Gift	D			-25,000			162,161
2025-12-04	2025-12-02	4	Dolev Ido	ONTO	Common Stock	F - Taxes	D		154.0100	-3,183	-490		23,915
2025-10-06	2025-10-03	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		143.7100	-594	-85		11,342
2025-09-03	2025-09-02	4	Chen Shirley	ONTO	Common Stock	A - Award	D			12,994			12,994
2025-09-03	2025-09-02	4	ROBERTS BRIAN K	ONTO	Common Stock	A - Award	D			21,175			21,175
2025-06-04	2025-06-02	4	Dolev Ido	ONTO	Common Stock	A - Award	D			5,391			26,953
2025-06-04	2025-06-02	4	Dolev Ido	ONTO	Common Stock	A - Award	D			21,562			21,562
2025-05-23	2025-05-21	4	Su May	ONTO	Common Stock	A - Award	D			2,114			7,223
2025-05-23	2025-05-21	4	Kelley Stephen Douglas	ONTO	Common Stock	A - Award	D			2,114			5,623
2025-05-23	2025-05-21	4	Lynch Susan D	ONTO	Common Stock	A - Award	D			2,114			2,923
2025-05-23	2025-05-21	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			2,114			11,931
2025-05-23	2025-05-21	4	SCHWARTZ STEPHEN S	ONTO	Common Stock	A - Award	D			2,114			2,775
2025-05-23	2025-05-21	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			2,114			37,752
2025-05-19	2025-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		98.0400	-609	-60		11,791
2025-05-19	2025-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		98.0400	-217	-21		12,400
2025-05-19	2025-05-17	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		99.4000	-2,066	-205		13,640
2025-05-19	2025-05-15	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		98.0400	-603	-59		18,010
2025-03-05	2025-03-03	4	YALDAEI RAMIL	ONTO	Common Stock	A - Award	D			3,769			12,617
2025-03-05	2025-03-03	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			2,941			18,613
2025-03-05	2025-03-03	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			23,212			187,161
2025-03-05	2025-03-03	4	Slicer Mark	ONTO	Common Stock	A - Award	D			2,941			15,706
2025-03-05	2025-03-03	4	Vedula Srini	ONTO	Common Stock	A - Award	D			2,574			18,730
2025-03-03	2025-03-01	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		145.6600	-304	-44		15,672
2025-03-03	2025-03-01	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		145.6600	-1,925	-280		163,949
2025-03-03	2025-03-01	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		145.6600	-336	-49		12,765
2025-03-03	2025-03-01	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		145.6600	-199	-29		16,156
2025-03-03	2025-03-01	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		145.6600	-305	-44		8,848
2025-02-19	2025-02-14	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		176.5500	-464	-82		16,355
2025-02-19	2025-02-14	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		176.5500	-1,391	-246		16,819
2025-02-19	2025-02-14	4	Vedula Srini	ONTO	Common Stock	M - Exercise	D			2,738			18,210
2025-02-19	2025-02-14	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		176.5500	-620	-109		13,101
2025-02-19	2025-02-14	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		176.5500	-1,776	-314		13,721
2025-02-19	2025-02-14	4	Slicer Mark	ONTO	Common Stock	M - Exercise	D			4,564			15,497
2025-02-19	2025-02-14	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		176.5500	-3,812	-673		165,874
2025-02-19	2025-02-14	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		176.5500	-11,435	-2,019		169,686
2025-02-19	2025-02-14	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			23,650			181,121
2025-02-19	2025-02-14	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		176.5500	-493	-87		15,976
2025-02-19	2025-02-14	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		176.5500	-1,830	-323		16,469
2025-02-19	2025-02-14	4	OH Yoon Ah	ONTO	Common Stock	M - Exercise	D			3,956			18,299
2025-02-18	2025-02-13	4	Vedula Srini	ONTO	Common Stock	S - Sale	D		169.5800	-238	-40		15,472
2025-02-12	2025-02-10	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		183.2800	-9,210	-1,688		157,471
2025-02-12	2025-02-10	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			19,048			166,681
2025-02-12	2025-02-10	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		183.2800	-2,859	-524		147,633
2025-02-12	2025-02-10	4	OH Yoon Ah	ONTO	Common Stock	M - Exercise	D			2,720			14,343
2025-02-12	2025-02-10	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		183.2800	-1,016	-186		11,623
2025-02-12	2025-02-10	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		183.2800	-375	-69		12,639
2025-02-12	2025-02-10	4	Vedula Srini	ONTO	Common Stock	M - Exercise	D			1,632			15,710
2025-02-12	2025-02-10	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		183.2800	-839	-154		14,078
2025-02-12	2025-02-10	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		183.2800	-306	-56		14,917
2025-01-22	2025-01-21	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		219.1900	-35,000	-7,672		150,492
2025-01-21	2025-01-16	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		212.1100	-100	-21		185,492
2025-01-21	2025-01-16	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		211.2400	-29,900	-6,316		185,592
2025-01-16	2025-01-14	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		201.2600	-1,732	-349		215,492
2025-01-16	2025-01-14	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		200.0900	-18,268	-3,655		217,224
2025-01-16	2025-01-15	4	Vedula Srini	ONTO	Common Stock	S - Sale	D		205.0000	-827	-170		15,223
2024-11-18	2024-11-15	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		160.4100	-1,100	-176		10,933
2024-10-28	2024-10-25	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		204.3900	-1,296	-265		13,014
2024-10-04	2024-10-03	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		206.5500	-592	-122		9,148
2024-09-04	2024-09-01	4	BROOKS D MAYSON	ONTO	Common Stock	F - Taxes	D		213.2200	-224	-48		3,025
2024-09-04	2024-09-03	4	Vedula Srini	ONTO	Common Stock	S - Sale	D		207.2400	-1,275	-264		16,050
2024-09-04	2024-08-30	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		213.2200	-280	-60		17,325
2024-08-22	2024-08-20	4	SCHWARTZ STEPHEN S	ONTO	Common Stock	A - Award	D			661			661
2024-06-11	2024-06-10	4	Vedula Srini	ONTO	Common Stock	S - Sale	D		213.4000	-1,486	-317		17,433
2024-06-10	2024-06-07	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		217.1700	-519	-113		12,033
2024-06-10	2024-06-06	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		221.2100	-519	-115		12,552
2024-05-23	2024-05-22	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			809			35,638
2024-05-23	2024-05-22	4	TSINGOS CHRISTINE A	ONTO	Common Stock	A - Award	D			809			42,918
2024-05-23	2024-05-22	4	Kelley Stephen Douglas	ONTO	Common Stock	A - Award	D			809			3,509
2024-05-23	2024-05-22	4	Lynch Susan D	ONTO	Common Stock	A - Award	D			809			809
2024-05-23	2024-05-22	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			809			9,817
2024-05-23	2024-05-22	4	Su May	ONTO	Common Stock	A - Award	D			809			5,109
2024-05-23	2024-05-22	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			809			20,210
2024-05-21	2024-05-17	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		223.5000	-1,633	-365		13,071
2024-05-17	2024-05-15	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		233.6300	-603	-141		14,310
2024-05-17	2024-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		233.6300	-545	-127		9,576
2024-05-17	2024-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		233.6300	-194	-45		10,121
2024-04-03	2024-04-01	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		185.3000	-302	-56		18,919
2024-03-22	2024-03-20	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		178.1600	-2,914	-519		235,492
2024-03-22	2024-03-20	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		177.0400	-1,816	-322		238,406
2024-03-22	2024-03-20	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		176.0000	-22,596	-3,977		240,222
2024-03-22	2024-03-20	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		174.7900	-2,060	-360		262,818
2024-03-22	2024-03-20	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		173.9600	-6,270	-1,091		264,878
2024-03-22	2024-03-20	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		172.8300	-4,344	-751		271,148
2024-03-18	2024-03-18	4	OH Yoon Ah	ONTO	Common Stock	S - Sale	D		180.0000	-1,685	-303		14,913
2024-03-18	2024-03-15	4	OH Yoon Ah	ONTO	Common Stock	S - Sale	D		173.9600	-2,685	-467		16,598
2024-03-05	2024-03-01	4	Slicer Mark	ONTO	Common Stock	A - Award	D			2,077			14,704
2024-03-05	2024-03-01	4	Vedula Srini	ONTO	Common Stock	A - Award	D			1,169			19,221
2024-03-05	2024-03-01	4	YALDAEI RAMIL	ONTO	Common Stock	A - Award	D			1,688			10,315
2024-03-05	2024-03-01	4	BROOKS D MAYSON	ONTO	Common Stock	A - Award	D			883			3,077
2024-03-05	2024-03-01	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			1,883			19,283
2024-03-05	2024-03-01	4	Fiordalice Robert	ONTO	Common Stock	A - Award	D			779			8,763
2024-03-05	2024-03-01	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			11,943			275,492
2024-02-16	2024-02-14	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		173.0800	-493	-85		17,400
2024-02-16	2024-02-14	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		173.0800	-484	-84		12,627
2024-02-16	2024-02-14	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		173.0800	-3,812	-660		263,549
2024-02-16	2024-02-14	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		173.0800	-463	-80		18,052
2024-02-16	2024-02-14	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		173.0800	-238	-41		7,984
2024-02-13	2024-02-13	4	MILLER DAVID BRIAN	ONTO	Common Stock	S - Sale	D		170.4900	-2,800	-477		9,008
2024-02-12	2024-02-10	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		180.0100	-755	-136		8,222
2024-02-12	2024-02-10	4	Fiordalice Robert	ONTO	Common Stock	M - Exercise	D			1,742			8,977
2024-02-12	2024-02-08	4	Fiordalice Robert	ONTO	Common Stock	M - Exercise	D			1,406			7,235
2024-02-12	2024-02-08	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		164.7600	-648	-107		5,829
2024-02-12	2024-02-10	4	OH Yoon Ah	ONTO	Common Stock	M - Exercise	D			2,722			17,893
2024-02-12	2024-02-10	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		180.0100	-1,395	-251		15,171
2024-02-12	2024-02-10	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		180.0100	-9,211	-1,658		267,361
2024-02-12	2024-02-10	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			19,050			276,572
2024-02-12	2024-02-10	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		180.0100	-3,071	-553		257,522
2024-02-12	2024-02-08	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		164.7600	-12,003	-1,978		260,593
2024-02-12	2024-02-08	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			24,834			272,596
2024-02-12	2024-02-08	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		164.7600	-4,032	-664		247,762
2024-02-12	2024-02-10	4	Vedula Srini	ONTO	Common Stock	M - Exercise	D			1,634			18,515
2024-02-12	2024-02-10	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		180.0100	-1,142	-206		16,881
2023-10-26	2023-10-25	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		111.1600	-795	-88		16,566
2023-10-04	2023-10-03	4	YALDAEI RAMIL	ONTO	Common Stock	F - Taxes	D		125.3900	-421	-53		8,547
2023-09-18	2023-09-15	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		127.0300	-169	-21		13,111
2023-09-18	2023-09-15	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		125.9800	-1,507	-190		13,280
2023-09-18	2023-09-15	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		124.3100	-601	-75		14,787
2023-09-18	2023-09-15	4	Slicer Mark	ONTO	Common Stock	S - Sale	D		123.6400	-728	-90		15,388
2023-09-18	2023-09-15	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		127.6200	-162	-21		6,477
2023-09-18	2023-09-15	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		126.5600	-100	-13		6,639
2023-09-18	2023-09-15	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		126.0200	-3,746	-472		6,739
2023-09-18	2023-09-15	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		124.4800	-1,200	-149		10,485
2023-09-18	2023-09-15	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		123.6600	-1,841	-228		11,685
2023-09-05	2023-09-01	4	BROOKS D MAYSON	ONTO	Common Stock	A - Award	D			2,194			2,194
2023-09-05	2023-09-01	4	Vedula Srini	ONTO	Common Stock	S - Sale	D		137.0000	-1,469	-201		17,976
2023-08-31	2023-08-30	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		136.7200	-191	-26		19,445
2023-08-22	2023-08-21	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		114.4400	-4,886	-559		251,794
2023-08-22	2023-08-21	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		113.7600	-9,696	-1,103		256,680
2023-08-22	2023-08-21	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		112.4900	-6,763	-761		266,376
2023-08-22	2023-08-21	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		111.8600	-7,002	-783		273,139
2023-08-22	2023-08-21	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		110.1600	-2,653	-292		280,141
2023-06-16	2023-06-15	4	Jin Ju	ONTO	Common Stock	S - Sale	D		105.1700	-3,231	-340		10,254
2023-06-06	2023-06-05	4	Jin Ju	ONTO	Common Stock	S - Sale	D		107.7200	-1,232	-133		13,485
2023-05-30	2023-05-26	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		109.4000	-846	-93		13,526
2023-05-25	2023-05-23	4	MILLER DAVID BRIAN	ONTO	Common Stock	S - Sale	D		99.2100	-1,185	-118		11,808
2023-05-25	2023-05-23	4	MILLER DAVID BRIAN	ONTO	Common Stock	S - Sale	D		99.8400	-3,815	-381		12,993
2023-05-22	2023-05-18	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		101.2500	-780	-79		14,372
2023-05-18	2023-05-17	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		97.2000	-768	-75		15,152
2023-05-17	2023-05-17	4	Slicer Mark	ONTO	Common Stock	F - Taxes	D		97.9500	-1,269	-124		16,116
2023-05-17	2023-05-15	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		93.1500	-669	-62		15,920
2023-05-17	2023-05-16	4	Jin Ju	ONTO	Common Stock	S - Sale	D		95.0000	-1,603	-152		14,717
2023-05-16	2023-05-15	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			3,746			17,361
2023-05-16	2023-05-15	4	YALDAEI RAMIL	ONTO	Common Stock	A - Award	D			5,084			8,738
2023-05-16		3/A	YALDAEI RAMIL	ONTO	Common Stock		D						3,654
2023-05-11	2023-05-09	4	Su May	ONTO	Common Stock	A - Award	D			2,200			4,300
2023-05-11	2023-05-09	4	TSINGOS CHRISTINE A	ONTO	Common Stock	A - Award	D			2,200			42,109
2023-05-11	2023-05-09	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			2,200			19,401
2023-05-11	2023-05-09	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			2,200			16,808
2023-05-11	2023-05-09	4	ROGGE KAREN M	ONTO	Common Stock	A - Award	D			2,200			5,150
2023-05-11	2023-05-09	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			2,200			34,829
2023-05-11	2023-05-09	4	Kelley Stephen Douglas	ONTO	Common Stock	A - Award	D			2,200			2,700
2023-04-11	2023-04-08	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		81.0700	-469	-38		19,450
2023-04-04	2023-04-01	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		87.8800	-211	-19		19,919
2023-02-16	2023-02-14	4	Kelley Stephen Douglas	ONTO	Common Stock	A - Award	D			500			500
2023-02-16	2023-02-14	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			23,650			282,794
2023-02-16	2023-02-14	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			3,955			13,615
2023-02-16	2023-02-14	4	Slicer Mark	ONTO	Common Stock	A - Award	D			4,564			17,385
2023-02-16	2023-02-14	4	Vedula Srini	ONTO	Common Stock	A - Award	D			2,738			20,130
2023-02-16	2023-02-14	4	Fiordalice Robert	ONTO	Common Stock	A - Award	D			2,191			16,589
2023-02-16	2023-02-14	4	Jin Ju	ONTO	Common Stock	A - Award	D			2,130			16,320
2023-02-16	2023-02-14	4	Harlow James	ONTO	Common Stock	A - Award	D			2,951			8,586
2023-02-13	2023-02-10	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		80.9000	-318	-26		9,660
2023-02-13	2023-02-10	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		80.9000	-3,091	-250		259,144
2023-02-13	2023-02-10	4	Harlow James	ONTO	Common Stock	F - Taxes	D		80.9000	-223	-18		5,635
2023-02-13	2023-02-10	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		80.9000	-189	-15		14,398
2023-02-09	2023-02-08	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			24,834			262,235
2023-02-09	2023-02-08	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		82.3000	-4,029	-332		237,401
2023-02-09	2023-02-08	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		82.3000	-12,087	-995		241,430
2023-02-09	2023-02-07	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			31,208			253,517
2023-02-09	2023-02-07	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		84.3100	-5,114	-431		222,309
2023-02-09	2023-02-07	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		84.3100	-15,189	-1,281		227,423
2023-02-09	2023-02-08	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		82.3000	-456	-38		14,587
2023-02-09	2023-02-08	4	Fiordalice Robert	ONTO	Common Stock	M - Exercise	D			1,408			15,043
2023-02-09	2023-02-08	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		82.3000	-152	-13		13,635
2023-02-09	2023-02-07	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		84.3100	-592	-50		13,787
2023-02-09	2023-02-07	4	Fiordalice Robert	ONTO	Common Stock	M - Exercise	D			1,690			14,379
2023-02-09	2023-02-07	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		84.3100	-212	-18		12,689
2023-02-09	2023-02-08	4	Jin Ju	ONTO	Common Stock	M - Exercise	D			1,988			14,190
2023-02-09	2023-02-07	4	Jin Ju	ONTO	Common Stock	M - Exercise	D			1,820			12,202
2022-10-26	2022-10-25	4	OH Yoon Ah	ONTO	Common Stock	F - Taxes	D		67.3000	-787	-53		9,978
2022-10-04	2022-10-01	4	Harlow James	ONTO	Common Stock	F - Taxes	D		64.0500	-401	-26		5,857
2022-08-09	2022-08-05	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		89.1000	-662	-59		12,900
2022-06-02	2022-05-31	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		80.3800	-452	-36		13,316
2022-05-19	2022-05-17	4	Slicer Mark	ONTO	Common Stock	A - Award	D			12,821			12,821
2022-05-12	2022-05-10	4	TSINGOS CHRISTINE A	ONTO	Common Stock	A - Award	D			2,100			39,909
2022-05-12	2022-05-10	4	ROGGE KAREN M	ONTO	Common Stock	A - Award	D			2,100			2,950
2022-05-12	2022-05-10	4	Su May	ONTO	Common Stock	A - Award	D			2,100			2,100
2022-05-12	2022-05-10	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			2,100			32,629
2022-05-12	2022-05-10	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			2,100			17,201
2022-05-12	2022-05-10	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			2,100			14,608
2022-04-12	2022-04-08	4	Vedula Srini	ONTO	Common Stock	F - Taxes	D		72.5900	-468	-34		17,146
2022-02-17	2022-02-15	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		90.7500	-15,360	-1,394		3,500
2022-02-17	2022-02-15	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		89.6000	-33,523	-3,004		18,860
2022-02-17	2022-02-15	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		89.0300	-12,172	-1,084		52,383
2022-02-14	2022-02-10	4	Jin Ju	ONTO	Performance Stock Unit	A - Award	D			871		871
2022-02-14	2022-02-10	4	Jin Ju	ONTO	Performance Stock Unit	A - Award	D			871		871
2022-02-14	2022-02-10	4	Jin Ju	ONTO	Common Stock	A - Award	D			1,742			10,135
2022-02-14	2022-02-10	4	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			9,524		9,524
2022-02-14	2022-02-10	4	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			9,525		9,525
2022-02-14	2022-02-10	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			19,049			242,612
2022-02-14	2022-02-10	4	Harlow James	ONTO	Performance Stock Unit	A - Award	D			952		952
2022-02-14	2022-02-10	4	Harlow James	ONTO	Performance Stock Unit	A - Award	D			953		953
2022-02-14	2022-02-10	4	Harlow James	ONTO	Common Stock	A - Award	D			1,905			6,012
2022-02-14	2022-02-10	4	OH Yoon Ah	ONTO	Performance Stock Unit	A - Award	D			1,360		1,360
2022-02-14	2022-02-10	4	OH Yoon Ah	ONTO	Performance Stock Unit	A - Award	D			1,361		1,361
2022-02-14	2022-02-10	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			2,722			10,765
2022-02-14	2022-02-10	4	ROTH STEVEN R	ONTO	Performance Stock Unit	A - Award	D			1,333		1,333
2022-02-14	2022-02-10	4	ROTH STEVEN R	ONTO	Performance Stock Unit	A - Award	D			1,334		1,334
2022-02-14	2022-02-10	4	ROTH STEVEN R	ONTO	Common Stock	A - Award	D			2,667			23,043
2022-02-14	2022-02-10	4	Vedula Srini	ONTO	Performance Stock Unit	A - Award	D			816		816
2022-02-14	2022-02-10	4	Vedula Srini	ONTO	Performance Stock Unit	A - Award	D			817		817
2022-02-14	2022-02-10	4	Vedula Srini	ONTO	Common Stock	A - Award	D			1,633			17,614
2022-02-14	2022-02-10	4	Fiordalice Robert	ONTO	Performance Stock Unit	A - Award	D			871		871
2022-02-14	2022-02-10	4	Fiordalice Robert	ONTO	Performance Stock Unit	A - Award	D			871		871
2022-02-14	2022-02-10	4	Fiordalice Robert	ONTO	Common Stock	A - Award	D			1,742			13,768
2022-02-09	2022-02-08	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		93.0900	-152	-14		12,026
2022-02-09	2022-02-07	4	Fiordalice Robert	ONTO	Performance Stock Unit	M - Exercise	D			-845		0
2022-02-09	2022-02-07	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		90.4200	-212	-19		12,178
2022-02-09	2022-02-07	4	Fiordalice Robert	ONTO	Common Stock	F - Taxes	D		90.4200	-581	-53		12,390
2022-02-09	2022-02-07	4	Fiordalice Robert	ONTO	Common Stock	M - Exercise	D			1,690			12,971
2022-02-09	2022-02-08	4	Jin Ju	ONTO	Common Stock	F - Taxes	D		93.0900	-202	-19		8,393
2022-02-09	2022-02-07	4	Jin Ju	ONTO	Performance Stock Unit	M - Exercise	D			-910		0
2022-02-09	2022-02-07	4	Jin Ju	ONTO	Common Stock	F - Taxes	D		90.4200	-217	-20		8,595
2022-02-09	2022-02-07	4	Jin Ju	ONTO	Common Stock	F - Taxes	D		90.4200	-582	-53		8,812
2022-02-09	2022-02-07	4	Jin Ju	ONTO	Common Stock	M - Exercise	D			1,820			9,394
2022-02-09	2022-02-08	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		93.0900	-778	-72		20,376
2022-02-09	2022-02-07	4	ROTH STEVEN R	ONTO	Performance Stock Unit	M - Exercise	D			-3,186		0
2022-02-09	2022-02-07	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		90.4200	-792	-72		21,154
2022-02-09	2022-02-07	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		90.4200	-2,374	-215		21,946
2022-02-09	2022-02-07	4	ROTH STEVEN R	ONTO	Common Stock	M - Exercise	D			6,372			24,320
2022-02-09	2022-02-06	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		90.0500	-855	-77		17,948
2022-02-09	2022-02-08	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		93.0900	-3,704	-345		223,563
2022-02-09	2022-02-07	4	Plisinski Michael P	ONTO	Performance Stock Unit	M - Exercise	D			-15,605		0
2022-02-09	2022-02-07	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		90.4200	-4,654	-421		227,267
2022-02-09	2022-02-07	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		90.4200	-13,960	-1,262		231,921
2022-02-09	2022-02-07	4	Plisinski Michael P	ONTO	Common Stock	M - Exercise	D			31,210			245,881
2022-02-09	2022-02-06	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		90.0500	-2,972	-268		214,671
2022-01-28		3	Fiordalice Robert	ONTO	Common Stock		D						11,281
2022-01-24	2022-01-20	4	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-100			64,555
2022-01-18	2022-01-14	4	ROTH STEVEN R	ONTO	Common Stock	S - Sale	D		105.0000	-5,000	-525		18,803
2022-01-07	2021-12-10	5	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-1,000			64,655
2022-01-07	2021-03-05	5	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-250			280,788
2021-12-10	2021-12-08	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		98.1200	-22,633	-2,221		65,905
2021-12-09	2021-12-07	4	MILLER DAVID BRIAN	ONTO	Common Stock	S - Sale	D		97.4100	-5,500	-536		12,508
2021-11-23	2021-11-19	4	Vedula Srini	ONTO	Common Stock	S - Sale	D		90.3100	-6,225	-562		15,852
2021-11-18	2021-11-17	4	ROGGE KAREN M	ONTO	Common Stock	A - Award	D			850			850
2021-11-03	2021-11-03	4	ROTH STEVEN R	ONTO	Common Stock	S - Sale	D		83.0000	-5,000	-415		23,803
2021-11-03	2021-11-01	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		80.3600	-50,000	-4,018		88,538
2021-11-03	2021-11-01	4	BERLINGHIERI LEO	ONTO	Common Stock	S - Sale	D		80.4800	-5,275	-425		15,101
2021-10-26	2021-10-25	4	OH Yoon Ah	ONTO	Common Stock	A - Award	D			8,043			8,043
2021-10-05	2021-10-01	4	Harlow James	ONTO	Common Stock	A - Award	D			4,107			4,107
2021-09-14	2021-09-14	4	Jin Ju	ONTO	Common Stock	D - Sale to Issuer	D		78.5800	-1,000	-79		7,574
2021-09-14	2021-09-13	4	BERLINGHIERI LEO	ONTO	Common Stock	D - Sale to Issuer	D		77.9100	-1,716	-134		20,376
2021-09-14	2021-09-13	4	BERLINGHIERI LEO	ONTO	Common Stock	D - Sale to Issuer	D		77.1400	-3,784	-292		22,092
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-2,400		0
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-2,401		0
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-3,413		0
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-3,414		0
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Common Stock	D - Sale to Issuer	D			-4,244			33,896
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Common Stock	D - Sale to Issuer	D			-1,415			38,140
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Common Stock	D - Sale to Issuer	D			-4,551			39,555
2021-09-08	2021-09-06	4	Kocher Rollin	ONTO	Common Stock	D - Sale to Issuer	D			-4,802			44,106
2021-09-01	2021-08-30	4	Vedula Srini	ONTO	Common Stock	A - Award	D			1,661			22,077
2021-09-01		3	Vedula Srini	ONTO	Common Stock		D						20,416
2021-08-10	2021-08-06	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		75.3400	-29,592	-2,229		217,643
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-724		0
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-725		0
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-975		0
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Performance Stock Unit	D - Sale to Issuer	D			-975		0
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Common Stock	D - Sale to Issuer	D			-1,608			5,338
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Common Stock	D - Sale to Issuer	D			-1,300			6,946
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Common Stock	D - Sale to Issuer	D			-1,449			8,246
2021-06-30	2021-06-25	4	Iacopetti Dean	ONTO	Common Stock	D - Sale to Issuer	D			-2,230			9,695
2021-06-17	2021-06-16	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		75.2400	-1,700	-128		247,235
2021-06-17	2021-06-15	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		75.2500	-1,800	-135		248,935
2021-06-17	2021-06-15	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		75.1600	-4,296	-323		138,538
2021-06-15	2021-06-14	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		75.3000	-6,908	-520		250,735
2021-06-15	2021-06-14	4	Heidrich Kevin	ONTO	Common Stock	S - Sale	D		74.8000	-6,474	-484		20,470
2021-06-15	2021-06-14	4	Heidrich Kevin	ONTO	Common Stock	S - Sale	D		75.0100	-243	-18		26,944
2021-06-15	2021-06-14	4	Heidrich Kevin	ONTO	Common Stock	S - Sale	D		75.0500	-11,099	-833		27,187
2021-06-15	2021-06-14	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		75.1000	-45,303	-3,402		142,834
2021-06-15	2021-06-11	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		75.0000	-401	-30		188,137
2021-06-02	2021-06-01	4	SMEDT RODNEY	ONTO	Common Stock	F - Taxes	D		72.0600	-540	-39		31,998
2021-06-02	2021-05-31	4	SMEDT RODNEY	ONTO	Common Stock	F - Taxes	D		71.7700	-1,575	-113		32,538
2021-06-02	2021-05-31	4	Iacopetti Dean	ONTO	Common Stock	F - Taxes	D		71.7700	-550	-39		11,925
2021-05-26	2021-05-24	4	Rhine Bruce C Trust - CRT	ONTO	Common Stock	S - Sale	I		65.5200	-30,000	-1,966		0
2021-05-12	2021-05-11	4	TSINGOS CHRISTINE A	ONTO	Common Stock	A - Award	D			2,500			37,809
2021-05-12	2021-05-11	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			2,500			30,529
2021-05-12	2021-05-11	4	Rhine Bruce C	ONTO	Common Stock	A - Award	D			2,500			188,538
2021-05-12	2021-05-11	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			2,500			18,008
2021-05-12	2021-05-11	4	Brown Edward J Jr	ONTO	Common Stock	A - Award	D			2,500			44,739
2021-05-12	2021-05-11	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			2,500			25,876
2021-04-14	2021-04-13	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		71.3900	-800	-57		186,038
2021-04-14	2021-04-13	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		70.1900	-16,511	-1,159		186,838
2021-04-14	2021-04-12	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		71.2400	-21,110	-1,504		203,349
2021-04-14	2021-04-12	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		70.5800	-11,579	-817		224,459
2021-04-06	2021-04-05	4	ROTH STEVEN R	ONTO	Common Stock	S - Sale	D		70.0000	-15,000	-1,050		28,803
2021-03-16	2021-03-12	4	Rhine Bruce C Trust - CRT	ONTO	Common Stock	G - Gift	I			30,000			30,000
2021-03-16	2021-03-12	4	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-30,000			236,038
2021-03-16	2021-03-12	4	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-15,000			266,038
2021-03-15	2021-03-11	4	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		64.1100	-1,531	-98		38,286
2021-03-15	2021-03-11	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		64.1100	-555	-36		48,517
2021-03-15	2021-03-11	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		64.1100	-1,467	-94		49,072
2021-02-25	2021-02-24	4	MILLER DAVID BRIAN	ONTO	Common Stock	D - Sale to Issuer	D		62.9500	-6,501	-409		15,508
2021-02-25	2021-02-23	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		62.2600	-2,225	-139		50,539
2021-02-25	2021-02-23	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		62.2600	-558	-35		52,764
2021-02-25	2021-02-23	4	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		62.2600	-1,932	-120		39,817
2021-02-12	2021-02-11	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		61.6000	-3,703	-228		281,038
2021-02-12	2021-02-11	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		60.7900	-141,631	-8,610		284,741
2021-02-11	2021-02-10	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		59.3400	-12,244	-727		426,372
2021-02-11	2021-02-10	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		60.3000	-655	-39		438,616
2021-02-11	2021-02-09	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		60.2300	-7,091	-427		439,271
2021-02-11	2021-02-09	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		59.2600	-34,676	-2,055		446,362
2021-02-10	2021-02-08	4	Heidrich Kevin	ONTO	Performance Stock Unit	A - Award	D			1,241		1,241
2021-02-10	2021-02-08	4	Heidrich Kevin	ONTO	Performance Stock Unit	A - Award	D			1,242		1,242
2021-02-10	2021-02-08	4	Heidrich Kevin	ONTO	Common Stock	A - Award	D			2,484			41,749
2021-02-10	2021-02-08	4	HARTUNIAN BARRY	ONTO	Performance Stock Unit	A - Award	D			724		724
2021-02-10	2021-02-08	4	HARTUNIAN BARRY	ONTO	Performance Stock Unit	A - Award	D			725		725
2021-02-10	2021-02-08	4	HARTUNIAN BARRY	ONTO	Common Stock	A - Award	D			1,449			3,058
2021-02-10	2021-02-08	4	SMEDT RODNEY	ONTO	Performance Stock Unit	A - Award	D			972		972
2021-02-10	2021-02-08	4	SMEDT RODNEY	ONTO	Performance Stock Unit	A - Award	D			973		973
2021-02-10	2021-02-08	4	SMEDT RODNEY	ONTO	Common Stock	A - Award	D			1,946			34,113
2021-02-10	2021-02-08	4	Jin Ju	ONTO	Performance Stock Unit	A - Award	D			993		993
2021-02-10	2021-02-08	4	Jin Ju	ONTO	Performance Stock Unit	A - Award	D			994		994
2021-02-10	2021-02-08	4	Jin Ju	ONTO	Common Stock	A - Award	D			1,987			8,049
2021-02-10	2021-02-08	4	Iacopetti Dean	ONTO	Performance Stock Unit	A - Award	D			724		724
2021-02-10	2021-02-08	4	Iacopetti Dean	ONTO	Performance Stock Unit	A - Award	D			725		725
2021-02-10	2021-02-08	4	Iacopetti Dean	ONTO	Common Stock	A - Award	D			1,449			12,475
2021-02-10	2021-02-08	4	Kocher Rollin	ONTO	Performance Stock Unit	A - Award	D			2,400		2,400
2021-02-10	2021-02-08	4	Kocher Rollin	ONTO	Performance Stock Unit	A - Award	D			2,401		2,401
2021-02-10	2021-02-08	4	Kocher Rollin	ONTO	Common Stock	A - Award	D			4,802			53,322
2021-02-10	2021-02-08	4	KOCH ROBERT ALAN	ONTO	Performance Stock Unit	A - Award	D			1,035		1,035
2021-02-10	2021-02-08	4	KOCH ROBERT ALAN	ONTO	Performance Stock Unit	A - Award	D			1,035		1,035
2021-02-10	2021-02-08	4	KOCH ROBERT ALAN	ONTO	Common Stock	A - Award	D			2,070			35,689
2021-02-10	2021-02-08	4	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		60.4000	-341	-21		33,619
2021-02-10	2021-02-08	4	ROTH STEVEN R	ONTO	Performance Stock Unit	A - Award	D			2,690		2,690
2021-02-10	2021-02-08	4	ROTH STEVEN R	ONTO	Performance Stock Unit	A - Award	D			2,691		2,691
2021-02-10	2021-02-08	4	ROTH STEVEN R	ONTO	Common Stock	A - Award	D			5,381			43,805
2021-02-10	2021-02-08	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		60.4000	-804	-49		38,424
2021-02-10	2021-02-08	4	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			12,417		12,417
2021-02-10	2021-02-08	4	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			12,417		12,417
2021-02-10	2021-02-08	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			24,835			257,643
2021-02-10	2021-02-08	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		60.4000	-2,753	-166		232,808
2021-02-09	2021-02-07	4	Iacopetti Dean	ONTO	Common Stock	F - Taxes	D		59.9500	-267	-16		11,026
2021-02-09	2021-02-07	4	HARTUNIAN BARRY	ONTO	Common Stock	F - Taxes	D		59.9500	-212	-13		1,609
2021-02-09	2021-02-07	4	Jin Ju	ONTO	Common Stock	F - Taxes	D		59.9500	-217	-13		6,062
2021-02-09	2021-02-07	4	SMEDT RODNEY	ONTO	Common Stock	F - Taxes	D		59.9500	-219	-13		32,167
2021-02-09	2021-02-07	4	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		59.9500	-491	-29		39,265
2021-02-09	2021-02-07	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		59.9500	-908	-54		48,520
2021-02-09	2021-02-07	4	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		59.9500	-309	-19		33,960
2021-02-09	2021-02-06	4	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		59.9500	-302	-18		34,269
2021-02-09	2021-02-07	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		59.9500	-4,653	-279		235,561
2021-02-09	2021-02-06	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		59.9500	-2,935	-176		240,214
2021-02-09	2021-02-07	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		59.9500	-791	-47		39,228
2021-02-09	2021-02-06	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		59.9500	-866	-52		40,019
2021-01-29	2021-01-27	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		54.8300	-537	-29		40,885
2021-01-29	2021-01-27	4	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		54.8300	-562	-31		41,422
2021-01-29	2021-01-27	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		54.8300	-1,900	-104		243,149
2021-01-29	2021-01-27	4	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		54.8300	-2,006	-110		245,049
2021-01-29	2021-01-27	4	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		54.8300	-226	-12		34,571
2021-01-29	2021-01-27	4	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		54.8300	-228	-13		34,797
2021-01-13	2020-12-15	5	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-500			481,038
2021-01-13	2020-12-10	5	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-600			481,538
2021-01-13	2021-01-11	4	ROTH STEVEN R	ONTO	Common Stock	S - Sale	D		50.6400	-10,000	-506		41,984
2020-12-16	2020-12-14	4	KOCH ROBERT ALAN	ONTO	Common Stock	S - Sale	D		47.0500	-6,270	-295		35,025
2020-12-16	2020-12-14	4	KOCH ROBERT ALAN	ONTO	Common Stock	S - Sale	D		46.3000	-8,730	-404		41,295
2020-12-01	2020-11-27	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		45.0000	-2,500	-112		482,138
2020-11-25	2020-11-24	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		45.0100	-5,579	-251		484,638
2020-11-16	2020-11-13	4	Heidrich Kevin	ONTO	Common Stock	S - Sale	D		40.5500	-498	-20		39,394
2020-11-13	2020-11-11	4	Heidrich Kevin	ONTO	Common Stock	S - Sale	D		40.4000	-508	-21		39,892
2020-11-12	2020-11-09	4	ROTH STEVEN R	ONTO	Common Stock	S - Sale	D		40.0000	-5,000	-200		51,984
2020-11-09	2020-11-05	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		37.5200	-11,332	-425		490,217
2020-11-09	2020-11-05	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		37.0700	-88,668	-3,287		501,549
2020-11-05	2020-11-04	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		35.3400	-24,821	-877		247,055
2020-11-05	2020-11-03	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		36.0800	-100	-4		271,876
2020-11-05	2020-11-03	4	Plisinski Michael P	ONTO	Common Stock	S - Sale	D		35.2200	-45,079	-1,588		271,976
2020-10-16	2020-02-08	4/A	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		38.4500	-2,730	-105		317,055
2020-10-16	2020-02-07	4/A	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			15,604		15,604
2020-10-16	2020-02-07	4/A	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			15,605		15,605
2020-10-16	2020-02-07	4/A	Plisinski Michael P	ONTO	Common Stock	A - Award	D			31,210			319,785
2020-10-16	2020-02-06	4/A	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		41.4700	-2,910	-121		288,575
2020-10-16	2020-02-06	4/A	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		41.4700	-2,760	-114		291,485
2020-09-01	2020-08-31	4	Iacopetti Dean	ONTO	Common Stock	F - Taxes	D		31.2400	-791	-25		11,293
2020-08-17	2020-02-08	4/A	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		38.4500	-1,721	-66		43,629
2020-08-17	2020-02-23	4/A	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		37.1800	-1,992	-74		41,637
2020-08-17	2020-03-11	4/A	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		27.1600	-1,596	-43		40,041
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.5000	-300	-11		49,285
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.4900	-100	-4		49,585
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.4800	-200	-7		49,685
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.4500	-200	-7		49,885
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.3700	-400	-15		50,085
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.3400	-80	-3		50,485
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.3300	-100	-4		50,565
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.3200	-100	-4		50,665
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.2900	-400	-15		50,765
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.2700	-200	-7		51,165
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.2100	-7	-0		51,365
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.2000	-500	-18		51,372
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.1900	-100	-4		51,872
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.1800	-600	-22		51,972
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.1200	-200	-7		52,572
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.1000	-100	-4		52,772
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.0600	-300	-11		52,872
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.0400	-15	-1		53,172
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.0300	-300	-11		53,187
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.0200	-100	-4		53,487
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.3600	-100	-4		53,587
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.3100	-200	-7		53,687
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.2900	-300	-11		53,887
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.2600	-200	-7		54,187
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.1300	-300	-11		54,387
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.1200	-662	-23		54,687
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.1100	-45	-2		55,349
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.1000	-500	-18		55,394
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.0800	-104	-4		55,894
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.0600	-468	-16		55,998
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.0200	-100	-4		56,466
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		35.0100	-1,200	-42		56,566
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		34.8300	-100	-3		57,766
2020-08-11	2020-08-07	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		34.8000	-101	-4		57,866
2020-07-31	2020-07-29	4	Jin Ju	ONTO	Common Stock	F - Taxes	D		36.0600	-213	-8		6,173
2020-07-24	2020-07-23	4	ROTH STEVEN R	ONTO	Common Stock	S - Sale	D		37.0000	-10,000	-370		56,984
2020-06-10	2020-02-28	4	Jin Ju	ONTO	Common Stock	P - Purchase	D		30.0000	1,000	30		5,797
2020-06-10	2020-06-02	4	SMEDT RODNEY	ONTO	Common Stock	F - Taxes	D		30.8400	-492	-15		32,386
2020-06-02	2020-05-31	4	Iacopetti Dean	ONTO	Common Stock	F - Taxes	D		31.0800	-610	-19		12,084
2020-06-02	2020-06-01	4	SMEDT RODNEY	ONTO	Common Stock	F - Taxes	D		31.2000	-540	-17		32,878
2020-06-02	2020-05-31	4	SMEDT RODNEY	ONTO	Common Stock	F - Taxes	D		31.0800	-1,603	-50		33,418
2020-05-14	2020-05-12	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			4,800			22,009
2020-05-14	2020-05-12	4	Rhine Bruce C	ONTO	Common Stock	A - Award	D			4,800			590,217
2020-05-14	2020-05-12	4	SEAMS CHRISTOPHER A	ONTO	Common Stock	A - Award	D			4,800			28,029
2020-05-14	2020-05-12	4	TSINGOS CHRISTINE A	ONTO	Common Stock	A - Award	D			4,800			35,309
2020-05-14	2020-05-12	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			4,800			23,376
2020-05-14	2020-05-12	4	Brown Edward J Jr	ONTO	Common Stock	A - Award	D			4,800			42,239
2020-05-14	2020-05-12	4	Cassese Vita A	ONTO	Common Stock	A - Award	D			4,800			11,233
2020-05-14	2020-05-12	4	DEUSTER ROBERT G	ONTO	Common Stock	A - Award	D			4,800			17,276
2020-05-14	2020-05-12	4	Aukerman Jeffrey A.	ONTO	Common Stock	A - Award	D			4,800			8,097
2020-03-16	2020-03-11	4	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		27.1600	-1,158	-31		41,450
2020-03-16	2020-03-11	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		27.1600	-489	-13		57,411
2020-03-16	2020-03-11	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		27.1600	-1,467	-40		57,900
2020-02-25	2020-02-23	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		37.1800	-2,354	-88		59,367
2020-02-25	2020-02-23	4	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		37.1800	-558	-21		61,721
2020-02-25	2020-02-23	4	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		37.1800	-1,446	-54		42,608
2020-02-21	2020-02-20	4	WHITTEN JOHN R	ONTO	Common Stock	G - Gift	D			-2,000			18,618
2020-02-21	2020-02-19	4	WHITTEN JOHN R	ONTO	Common Stock	S - Sale	D		38.8900	-6,000	-233		20,618
2020-02-13	2020-02-12	4	Stultz Timothy J	ONTO	Common Stock	S - Sale	D		38.9400	-17,666	-688		209,143
2020-02-11	2020-02-08	4/A	Heidrich Kevin	ONTO	Common Stock	F - Taxes	D		38.4500	-1,296	-50		44,054
2020-02-11	2020-02-07	4/A	Heidrich Kevin	ONTO	Performance Stock Unit	A - Award	D			1,950		1,950
2020-02-11	2020-02-07	4/A	Heidrich Kevin	ONTO	Performance Stock Unit	A - Award	D			1,951		1,951
2020-02-11	2020-02-07	4/A	Heidrich Kevin	ONTO	Common Stock	A - Award	D			3,901			45,350
2020-02-11	2020-02-08	4/A	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		38.4500	-446	-17		62,279
2020-02-11	2020-02-08	4/A	Kocher Rollin	ONTO	Common Stock	F - Taxes	D		38.4500	-1,516	-58		62,725
2020-02-11	2020-02-07	4/A	Kocher Rollin	ONTO	Performance Stock Unit	A - Award	D			3,413		3,413
2020-02-11	2020-02-07	4/A	Kocher Rollin	ONTO	Performance Stock Unit	A - Award	D			3,414		3,414
2020-02-11	2020-02-07	4/A	Kocher Rollin	ONTO	Common Stock	A - Award	D			6,827			64,241
2020-02-11	2020-02-08	4/A	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		38.4500	-289	-11		50,025
2020-02-11	2020-02-07	4/A	KOCH ROBERT ALAN	ONTO	Performance Stock Unit	A - Award	D			1,625		1,625
2020-02-11	2020-02-07	4/A	KOCH ROBERT ALAN	ONTO	Performance Stock Unit	A - Award	D			1,626		1,626
2020-02-11	2020-02-07	4/A	KOCH ROBERT ALAN	ONTO	Common Stock	A - Award	D			3,251			50,314
2020-02-11	2020-02-06	4/A	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		41.4700	-308	-13		47,063
2020-02-11	2020-02-06	4/A	KOCH ROBERT ALAN	ONTO	Common Stock	F - Taxes	D		41.4700	-264	-11		47,371
2020-02-11	2020-02-08	4/A	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		38.4500	-1,375	-53		321,223
2020-02-11	2020-02-07	4/A	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			15,604		15,604
2020-02-11	2020-02-07	4/A	Plisinski Michael P	ONTO	Performance Stock Unit	A - Award	D			15,605		15,605
2020-02-11	2020-02-07	4/A	Plisinski Michael P	ONTO	Common Stock	A - Award	D			31,210			322,598
2020-02-11	2020-02-06	4/A	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		41.4700	-1,466	-61		291,388
2020-02-11	2020-02-06	4/A	Plisinski Michael P	ONTO	Common Stock	F - Taxes	D		41.4700	-1,391	-58		292,854
2020-02-11	2020-02-08	4/A	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		38.4500	-616	-24		66,984
2020-02-11	2020-02-07	4/A	ROTH STEVEN R	ONTO	Performance Stock Unit	A - Award	D			3,186		3,186
2020-02-11	2020-02-07	4/A	ROTH STEVEN R	ONTO	Performance Stock Unit	A - Award	D			3,186		3,186
2020-02-11	2020-02-07	4/A	ROTH STEVEN R	ONTO	Common Stock	A - Award	D			6,372			67,600
2020-02-11	2020-02-06	4/A	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		41.4700	-657	-27		61,228
2020-02-11	2020-02-06	4/A	ROTH STEVEN R	ONTO	Common Stock	F - Taxes	D		41.4700	-559	-23		61,885
2020-02-11	2020-02-07	4	SMEDT RODNEY	ONTO	Performance Stock Unit	A - Award	D			975		975
2020-02-11	2020-02-07	4	SMEDT RODNEY	ONTO	Performance Stock Unit	A - Award	D			975		975
2020-02-11	2020-02-07	4	SMEDT RODNEY	ONTO	Common Stock	A - Award	D			1,951			35,021
2020-02-11	2020-02-07	4	Iacopetti Dean	ONTO	Performance Stock Unit	A - Award	D			975		975
2020-02-11	2020-02-07	4	Iacopetti Dean	ONTO	Performance Stock Unit	A - Award	D			975		975
2020-02-11	2020-02-07	4	Iacopetti Dean	ONTO	Common Stock	A - Award	D			1,951			12,694
2020-02-11	2020-02-07	4	Jin Ju	ONTO	Performance Stock Unit	A - Award	D			910		910
2020-02-11	2020-02-07	4	Jin Ju	ONTO	Performance Stock Unit	A - Award	D			910		910
2020-02-11	2020-02-07	4	Jin Ju	ONTO	Common Stock	A - Award	D			1,821			4,797
2020-02-11	2020-02-07	4	HARTUNIAN BARRY	ONTO	Performance Stock Unit	A - Award	D			910		910
2020-02-11	2020-02-07	4	HARTUNIAN BARRY	ONTO	Performance Stock Unit	A - Award	D			910		910
2020-02-11	2020-02-07	4	HARTUNIAN BARRY	ONTO	Common Stock	A - Award	D			1,821			1,821
2020-02-10	2020-02-08	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		38.4500	-1,375	-53		290,013
2020-02-10	2020-02-06	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		41.4700	-1,466	-61		291,388
2020-02-10	2020-02-06	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		41.4700	-1,391	-58		292,854
2020-02-10	2020-02-08	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		38.4500	-616	-24		60,612
2020-02-10	2020-02-06	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		41.4700	-657	-27		61,228
2020-02-10	2020-02-06	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		41.4700	-559	-23		61,885
2020-02-10	2020-02-08	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		38.4500	-289	-11		46,774
2020-02-10	2020-02-06	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		41.4700	-308	-13		47,063
2020-02-10	2020-02-06	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		41.4700	-264	-11		47,371
2020-02-10	2020-02-08	4	Kocher Rollin	ONTO	Common Stock	D - Sale to Issuer	D		38.4500	-446	-17		55,452
2020-02-10	2020-02-08	4	Kocher Rollin	ONTO	Common Stock	D - Sale to Issuer	D		38.4500	-1,516	-58		55,898
2020-02-10	2020-02-08	4	Heidrich Kevin	ONTO	Common Stock	D - Sale to Issuer	D		38.4500	-1,296	-50		40,153
2020-01-29	2020-01-28	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		38.6300	-897	-35		294,245
2020-01-29	2020-01-28	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		38.6300	-1,076	-42		295,142
2020-01-29	2020-01-27	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		38.0200	-1,331	-51		296,218
2020-01-29	2020-01-27	4	Plisinski Michael P	ONTO	Common Stock	D - Sale to Issuer	D		38.0200	-1,185	-45		297,549
2020-01-29	2020-01-28	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		38.6300	-329	-13		62,444
2020-01-29	2020-01-28	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		38.6300	-389	-15		62,773
2020-01-29	2020-01-27	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		38.0200	-443	-17		63,162
2020-01-29	2020-01-27	4	ROTH STEVEN R	ONTO	Common Stock	D - Sale to Issuer	D		38.0200	-433	-16		63,605
2020-01-29	2020-01-28	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		38.6300	-269	-10		47,635
2020-01-29	2020-01-28	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		38.6300	-298	-12		47,904
2020-01-29	2020-01-27	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		38.0200	-229	-9		48,202
2020-01-29	2020-01-27	4	KOCH ROBERT ALAN	ONTO	Common Stock	D - Sale to Issuer	D		38.0200	-225	-9		48,431
2020-01-21	2020-01-16	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		40.0400	-100	-4		585,417
2020-01-21	2020-01-16	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		40.0300	-500	-20		585,517
2020-01-21	2020-01-16	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		40.0200	-5,801	-232		586,017
2020-01-21	2020-01-16	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		40.0000	-36,569	-1,463		591,818
2020-01-21	2020-01-16	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		40.0100	-37,030	-1,482		628,387
2020-01-15	2019-10-25	4/A	Aukerman Jeffrey A.	ONTO	Common Stock	A - Award	D			3,297			3,297
2020-01-15	2019-10-25	4/A	Aukerman Jeffrey A. By Investment LLC	ONTO	Common Stock	A - Award	I			20,463			20,463
2020-01-15	2019-12-31	4	Heidrich Kevin	ONTO	Common Stock	J - Other	D		29.9800	210	6		41,449
2020-01-07	2019-12-31	4	Vedula Srini	ONTO	Common Stock	J - Other	D		29.9800	257	8		27,144
2020-01-06	2020-01-02	4	Fiordalice Robert	ONTO	Common Stock	S - Sale	D		36.5400	-298	-11		13,772
2020-01-06	2020-01-02	4	Kocher Rollin	ONTO	Common Stock	S - Sale	D		36.5400	-168	-6		57,414
2020-01-03	2019-12-23	4	Stultz Timothy J	ONTO	Common Stock	G - Gift	D			-290			226,809
2019-12-18	2019-12-17	4	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-700			665,417
2019-12-16	2019-12-12	4	Rhine Bruce C	ONTO	Common Stock	G - Gift	D			-1,000			666,117
2019-11-26	2019-11-23	4	Swyt Greg	ONTO	Common Stock	D - Sale to Issuer	D		32.7000	-947	-31		11,680
2019-11-19	2019-11-15	4	Rhine Bruce C	ONTO	Common Stock	S - Sale	D		34.6600	-25,000	-866		667,117
2019-11-12	2019-10-25	4/A	Lesaicherre Pierre-Yves	ONTO	Performance Stock Units	M - Exercise	D			-62,500		0
2019-11-12	2019-10-25	4/A	Lesaicherre Pierre-Yves	ONTO	Common Stock	F - Taxes	D		35.3300	-102,989	-3,639		108,564
2019-11-12	2019-10-25	4/A	Lesaicherre Pierre-Yves	ONTO	Common Stock	M - Exercise	D			101,297			211,553
2019-11-04		3	Vedula Srini	ONTO	Common Stock		D						53,774
2019-11-04		3	Vedula Srini	ONTO	Common Stock		D						53,774
2019-11-04		3	Vedula Srini	ONTO	Common Stock		D						53,774
2019-11-04		3	Iacopetti Dean	ONTO	Common Stock		D						21,486
2019-11-04		3	Iacopetti Dean	ONTO	Common Stock		D						21,486
2019-11-04		3	Iacopetti Dean	ONTO	Common Stock		D						21,486
2019-11-04		3	Fiordalice Robert	ONTO	Common Stock		D						27,544
2019-11-04		3	Fiordalice Robert	ONTO	Common Stock		D						27,544
2019-11-04		3	Fiordalice Robert	ONTO	Common Stock		D						27,544
2019-11-04		3	SMEDT RODNEY	ONTO	Common Stock		D						66,140
2019-11-04		3	SMEDT RODNEY	ONTO	Common Stock		D						66,140
2019-11-04		3	SMEDT RODNEY	ONTO	Common Stock		D						66,140
2019-10-30	2019-10-25	4	Chan Chun Hoy	ONTO	Common Stock	A - Award	D			9,267			24,339
2019-10-30	2019-10-25	4	Chan Chun Hoy	ONTO	Common Stock	A - Award	D			15,072			15,072
2019-10-30	2019-10-25	4	Jin Ju	ONTO	Common Stock	A - Award	D			2,976			2,976
2019-10-30	2019-10-25	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			62,313			298,734
2019-10-30	2019-10-25	4	Plisinski Michael P	ONTO	Common Stock	A - Award	D			236,421			236,421
2019-10-29	2019-10-25	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	M - Exercise	D			-62,500		0
2019-10-29	2019-10-25	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	M - Exercise	D			-25,662		0
2019-10-29	2019-10-25	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	M - Exercise	D			-37,063		0
2019-10-29	2019-10-25	4	Lesaicherre Pierre-Yves	NANO	Common Stock	F - Taxes	D		35.3300	-92,134	-3,255		101,606
2019-10-29	2019-10-25	4	Lesaicherre Pierre-Yves	NANO	Common Stock	M - Exercise	D			83,484			193,740
2019-10-29	2019-10-25	4	Barnhart James	NANO	Common Stock	F - Taxes	D		35.3300	-12,380	-437		27,046
2019-10-29	2019-10-25	4	Taylor Janet Therese	NANO	Common Stock	F - Taxes	D		35.3300	-8,413	-297		30,110
2019-10-29	2019-10-25	4	Kocher Rollin	NANO	Performance Stock Units	M - Exercise	D			-1,950		0
2019-10-29	2019-10-25	4	Kocher Rollin	NANO	Performance Stock Units	M - Exercise	D			-4,847		0
2019-10-29	2019-10-25	4	Kocher Rollin	NANO	Performance Stock Units	M - Exercise	D			-6,366		0
2019-10-29	2019-10-25	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D			8,776			57,414
2019-10-29		3	WHITTEN JOHN R	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Sheaffer Michael	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Cassese Vita A	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Chan Chun Hoy	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Plisinski Michael P	ONTO	No securities beneficially owned		D						0
2019-10-29		3	ROTH STEVEN R	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Jin Ju	ONTO	No securities beneficially owned		D						0
2019-10-29		3	KOCH ROBERT ALAN	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Murray George C	ONTO	No securities beneficially owned		D						0
2019-10-29		3	MILLER DAVID BRIAN	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Lehmann Erich J	ONTO	No securities beneficially owned		D						0
2019-10-29		3	BERLINGHIERI LEO	ONTO	No securities beneficially owned		D						0
2019-10-29		3	da Silveira Elvino M	ONTO	No securities beneficially owned		D						0
2019-10-29		3	Aukerman Jeffrey A.	ONTO	No securities beneficially owned		D						0
2019-10-29	2019-10-25	4	Lehmann Erich J	ONTO	Common Stock	A - Award	D			7,210			16,767
2019-10-29	2019-10-25	4	Lehmann Erich J	ONTO	Common Stock	A - Award	D			9,557			9,557
2019-10-29		3	LaBua Leonard A	ONTO	No securities beneficially owned		D						0
2019-10-29	2019-10-25	4	Aukerman Jeffrey A.	ONTO	Common Stock	A - Award	D			3,297			23,760
2019-10-29	2019-10-25	4	Aukerman Jeffrey A. By Investment LLC	ONTO	Common Stock	A - Award	I			20,463			20,463
2019-10-29	2019-10-25	4	da Silveira Elvino M	ONTO	Common Stock	A - Award	D			8,649			31,867
2019-10-29	2019-10-25	4	da Silveira Elvino M	ONTO	Common Stock	A - Award	D			23,218			23,218
2019-10-29	2019-10-25	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			3,297			17,209
2019-10-29	2019-10-25	4	MILLER DAVID BRIAN	ONTO	Common Stock	A - Award	D			13,912			13,912
2019-10-29	2019-10-25	4	Cassese Vita A	ONTO	Common Stock	A - Award	D			3,297			6,433
2019-10-29	2019-10-25	4	Cassese Vita A	ONTO	Common Stock	A - Award	D			3,136			3,136
2019-10-29	2019-10-25	4	KOCH ROBERT ALAN	ONTO	Common Stock	A - Award	D			10,709			48,656
2019-10-29	2019-10-25	4	KOCH ROBERT ALAN	ONTO	Common Stock	A - Award	D			37,947			37,947
2019-10-29	2019-10-25	4	WHITTEN JOHN R	ONTO	Common Stock	A - Award	D			3,297			26,618
2019-10-29	2019-10-25	4	WHITTEN JOHN R	ONTO	Common Stock	A - Award	D			23,321			23,321
2019-10-29	2019-10-25	4	ROTH STEVEN R	ONTO	Common Stock	A - Award	D			21,212			64,038
2019-10-29	2019-10-25	4	ROTH STEVEN R	ONTO	Common Stock	A - Award	D			42,826			42,826
2019-10-29	2019-10-25	4	Murray George C	ONTO	Common Stock	A - Award	D			1,253			2,131
2019-10-29	2019-10-25	4	Murray George C	ONTO	Common Stock	A - Award	D			878			878
2019-10-29	2019-10-25	4	Sheaffer Michael	ONTO	Common Stock	A - Award	D			2,840			3,354
2019-10-29	2019-10-25	4	Sheaffer Michael	ONTO	Common Stock	A - Award	D			514			514
2019-10-29	2019-10-25	4	LaBua Leonard A	ONTO	Common Stock	A - Award	D			3,356			4,829
2019-10-29	2019-10-25	4	LaBua Leonard A	ONTO	Common Stock	A - Award	D			1,473			1,473
2019-10-29	2019-10-25	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			3,297			18,576
2019-10-29	2019-10-25	4	BERLINGHIERI LEO	ONTO	Common Stock	A - Award	D			15,279			15,279
2019-07-23	2019-07-23	4	Rhine Bruce C	NANO	Common Stock	G - Gift	D			-1,687			692,117
2019-07-16	2019-07-16	4	Stultz Timothy J	NANO	Common Stock	G - Gift	D			-150			227,099
2019-07-02	2019-06-30	4	Heidrich Kevin	NANO	Common Stock	J - Other	D		23.3835	639	15		41,239
2019-07-02	2019-06-30	4	Barnhart James	NANO	Common Stock	J - Other	D		23.3835	493	12		39,426
2019-07-02	2019-07-01	4	Swyt Greg	NANO	Common Stock	S - Sale	D		35.2700	-32	-1		12,627
2019-07-02	2019-07-01	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		35.2700	-693	-24		48,638
2019-07-02	2019-06-30	4	Taylor Janet Therese	NANO	Common Stock	J - Other	D		23.3835	662	15		38,523
2019-07-02	2019-06-30	4	Lesaicherre Pierre-Yves	NANO	Common Stock	J - Other	D		23.3835	908	21		110,256
2019-07-01	2019-06-28	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	15.85		-17,986		0
2019-07-01	2019-06-28	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		35.1000	-17,986	-631		227,249
2019-07-01	2019-06-28	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		15.8500	17,986	285		245,235
2019-07-01	2019-06-27	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	15.85		-30,000		17,986
2019-07-01	2019-06-27	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		35.0000	-30,000	-1,050		227,249
2019-07-01	2019-06-27	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		15.8500	30,000	476		257,249
2019-06-26	2019-06-24	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	15.85		-12,014		47,986
2019-06-26	2019-06-24	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		35.1700	-12,014	-423		227,249
2019-06-26	2019-06-24	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		15.8500	12,014	190		239,263
2019-06-03	2019-06-01	4	Barnhart James	NANO	Common Stock	F - Taxes	D		28.4500	-2,595	-74		38,933
2019-06-03	2019-06-02	4	Swyt Greg	NANO	Common Stock	F - Taxes	D		28.4500	-275	-8		12,627
2019-06-03	2019-06-01	4	Swyt Greg	NANO	Common Stock	F - Taxes	D		28.4500	-432	-12		12,902
2019-05-28	2019-05-27	4	Kocher Rollin	NANO	Common Stock	F - Taxes	D		29.3800	-1,496	-44		48,638
2019-05-23	2019-05-22	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			4,041			227,249
2019-05-23	2019-05-22	4	TSINGOS CHRISTINE A	NANO	Common Stock	A - Award	D			4,041			30,509
2019-05-23	2019-05-22	4	SEAMS CHRISTOPHER A	NANO	Common Stock	A - Award	D			4,041			23,229
2019-05-23	2019-05-22	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			4,041			37,439
2019-05-23	2019-05-22	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			4,041			693,804
2019-05-23	2019-05-22	4	DEUSTER ROBERT G	NANO	Common Stock	A - Award	D			4,041			12,476
2019-03-15	2019-03-11	4/A	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	A - Award	D			-37,063		37,063
2019-03-15	2019-03-11	4/A	Kocher Rollin	NANO	Performance Stock Unit	A - Award	D			-6,366		6,366
2019-03-13	2019-03-11	4	Kocher Rollin	NANO	Performance Stock Unit	A - Award	D			-4,244		4,244
2019-03-13	2019-03-11	4	Kocher Rollin	NANO	Common Stock	A - Award	D		29.6900	12,733	378		50,134
2019-03-13	2019-03-11	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	A - Award	D			-24,709		24,709
2019-03-13	2019-03-11	4	Lesaicherre Pierre-Yves	NANO	Common Stock	A - Award	D		29.6900	24,709	734		109,348
2019-03-13	2019-03-11	4	Taylor Janet Therese	NANO	Common Stock	A - Award	D		29.6900	9,263	275		37,861
2019-03-13	2019-03-11	4	Heidrich Kevin	NANO	Common Stock	A - Award	D		29.6900	10,106	300		40,600
2019-03-13	2019-03-11	4	Barnhart James	NANO	Common Stock	A - Award	D		29.6900	18,527	550		41,528
2019-03-13	2019-03-11	4	Swyt Greg	NANO	Common Stock	A - Award	D		29.6900	5,053	150		13,334
2019-02-28	2019-02-27	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		29.2300	-300	-9		223,208
2019-02-28	2019-02-27	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.3600	-19,700	-559		223,508
2019-02-28	2019-02-26	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		29.2800	-10,000	-293		243,208
2019-02-25	2019-02-23	4	Kocher Rollin	NANO	Performance Stock Unit	M - Exercise	D			-2,423		4,847
2019-02-25	2019-02-23	4	Kocher Rollin	NANO	Common Stock	F - Taxes	D		29.5900	-3,067	-91		37,401
2019-02-25	2019-02-23	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D			2,423			40,468
2019-02-25	2019-02-23	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	M - Exercise	D			-12,831		25,662
2019-02-25	2019-02-23	4	Lesaicherre Pierre-Yves	NANO	Common Stock	F - Taxes	D		29.5900	-7,468	-221		84,639
2019-02-25	2019-02-23	4	Lesaicherre Pierre-Yves	NANO	Common Stock	M - Exercise	D			12,831			92,107
2019-02-25	2019-02-23	4	Taylor Janet Therese	NANO	Common Stock	F - Taxes	D		29.5900	-1,899	-56		28,598
2019-02-25	2019-02-22	4	Taylor Janet Therese	NANO	Common Stock	F - Taxes	D		29.5900	-1,141	-34		30,497
2019-02-25	2019-02-23	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		29.5900	-1,693	-50		30,494
2019-02-25	2019-02-22	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		29.5900	-1,394	-41		32,187
2019-02-21	2019-02-20	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		30.1300	-17,667	-532		253,208
2019-02-12	2019-02-08	4	Kocher Rollin	NANO	Performance Stock Unit	M - Exercise	D			-812		1,950
2019-02-12	2019-02-08	4	Kocher Rollin	NANO	Common Stock	F - Taxes	D		29.0600	-1,835	-53		38,045
2019-02-12	2019-02-08	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D			812			39,880
2019-02-12	2019-02-08	4	Taylor Janet Therese	NANO	Common Stock	F - Taxes	D		29.0600	-1,616	-47		31,638
2019-02-12	2019-02-08	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		29.0600	-1,493	-43		33,581
2019-01-23	2019-01-16	4	Stultz Timothy J	NANO	Common Stock	G - Gift	D			-346			270,875
2019-01-08		3/A	Heidrich Kevin	NANO	Common Stock		D						33,907
2019-01-08	2018-12-31	4	Heidrich Kevin	NANO	Common Stock	J - Other	D		23.2305	243	6		35,074
2019-01-04	2019-01-03	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		26.8106	-183	-5		39,068
2019-01-04	2019-01-03	4	Swyt Greg	NANO	Common Stock	S - Sale	D		26.6984	-420	-11		8,281
2019-01-03	2018-12-31	4	Taylor Janet Therese	NANO	Common Stock	J - Other	D		23.2305	198	5		33,254
2019-01-03	2018-12-31	4	Barnhart James	NANO	Common Stock	J - Other	D		23.2305	482	11		23,001
2018-11-27	2018-11-27	4	Lesaicherre Pierre-Yves	NANO	Common Stock	S - Sale	D		31.3100	-6,856	-215		79,276
2018-11-26	2018-11-26	4	Swyt Greg	NANO	Common Stock	S - Sale	D		31.0500	-1,794	-56		8,090
2018-11-26	2018-11-23	4	Swyt Greg	NANO	Common Stock	S - Sale	D		30.8700	-948	-29		9,884
2018-08-28	2018-08-28	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		44.7800	-2,305	-103		33,056
2018-08-13	2018-08-13	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	19.03		-10,000		0
2018-08-13	2018-08-13	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		41.8000	-10,000	-418		271,221
2018-08-13	2018-08-13	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		19.0300	10,000	190		281,221
2018-08-13	2018-08-10	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	19.03		-10,000		10,000
2018-08-13	2018-08-10	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		42.5000	-100	-4		271,221
2018-08-13	2018-08-10	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		42.0100	-9,900	-416		271,321
2018-08-13	2018-08-10	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		19.0300	10,000	190		281,221
2018-08-13	2018-08-13	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		43.0000	-9,356	-402		35,548
2018-08-09	2018-08-09	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	19.03		-10,000		20,000
2018-08-09	2018-08-09	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		42.7000	-1,697	-72		271,221
2018-08-09	2018-08-09	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		42.1100	-8,303	-350		272,918
2018-08-09	2018-08-09	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		19.0300	10,000	190		281,221
2018-08-09	2018-08-08	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	19.03		-10,000		30,000
2018-08-09	2018-08-08	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		41.8100	-10,000	-418		271,221
2018-08-09	2018-08-08	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		19.0300	10,000	190		281,221
2018-08-09	2018-08-07	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	19.03		-10,000		40,000
2018-08-09	2018-08-07	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		42.5800	-600	-26		271,221
2018-08-09	2018-08-07	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		41.7700	-9,400	-393		271,821
2018-08-09	2018-08-07	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		19.0300	10,000	190		281,221
2018-08-07	2018-08-06	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	14.80		-3,655		0
2018-08-07	2018-08-06	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		42.6500	-3,655	-156		689,763
2018-08-07	2018-08-06	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		14.8000	3,655	54		693,418
2018-08-07	2018-08-07	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		41.9300	-747	-31		35,361
2018-07-03	2018-07-02	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		35.3200	-720	-25		39,068
2018-06-28		3	Swyt Greg	NANO	Common Stock		D						21,664
2018-06-28		3	Swyt Greg	NANO	Common Stock		D						21,664
2018-06-28		3	Swyt Greg	NANO	Common Stock		D						21,664
2018-06-04	2018-06-01	4	Barnhart James	NANO	Common Stock	A - Award	D			22,519			22,519
2018-05-29	2018-05-29	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		39.7100	-823	-33		39,068
2018-05-29	2018-05-27	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		38.6700	-1,496	-58		39,891
2018-05-24	2018-05-23	4	BENTLEY J THOMAS	NANO	Common Stock	S - Sale	D		37.9300	-15,000	-569		71,612
2018-05-24	2018-05-23	4	BENTLEY J THOMAS	NANO	Common Stock	G - Gift	D			-2,000			86,612
2018-05-24	2018-05-22	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			4,134			88,612
2018-05-24	2018-05-21	4	BENTLEY J THOMAS	NANO	Common Stock	G - Gift	D			-1,000			84,478
2018-05-24	2018-05-22	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			4,134			689,763
2018-05-24	2018-05-22	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			4,134			271,221
2018-05-24	2018-05-22	4	DEUSTER ROBERT G	NANO	Common Stock	A - Award	D			4,134			8,435
2018-05-24	2018-05-22	4	TSINGOS CHRISTINE A	NANO	Common Stock	A - Award	D			4,134			26,468
2018-05-24	2018-05-22	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			4,134			33,398
2018-05-24	2018-05-22	4	SEAMS CHRISTOPHER A	NANO	Common Stock	A - Award	D			4,134			19,188
2018-05-09	2018-05-09	4	BENTLEY J THOMAS	NANO	Common Stock	S - Sale	D		36.2800	-10,000	-363		85,478
2018-05-08	2018-05-08	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		35.6500	-15,000	-535		267,087
2018-05-08	2018-05-07	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		35.2200	-20,000	-704		282,087
2018-05-08	2018-05-04	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		35.1200	-50,000	-1,756		685,629
2018-05-07	2018-05-07	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		35.2900	-1,155	-41		35,411
2018-05-07	2018-05-07	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		35.3000	-345	-12		36,566
2018-05-03	2018-05-02	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		32.0000	-4,638	-148		36,911
2018-05-03	2018-05-02	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		31.0000	-2,162	-67		41,549
2018-05-03	2018-05-02	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		30.0000	-6,162	-185		43,711
2018-04-30	2018-04-26	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	A - Award	D			38,493		38,493
2018-04-30	2018-04-26	4	Lesaicherre Pierre-Yves	NANO	Common Stock	A - Award	D			25,662			85,142
2018-03-13	2018-03-12	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		30.0000	-4,528	-136		41,387
2018-03-12	2018-03-09	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		29.0700	-10,000	-291		302,087
2018-03-12	2018-03-08	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.4500	-10,000	-284		312,087
2018-03-08	2018-03-07	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.4100	-4,800	-136		322,087
2018-03-08	2018-03-07	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.0500	-5,200	-146		326,887
2018-03-08	2018-03-06	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		27.3200	-10,000	-273		332,087
2018-03-07	2018-03-05	4	Chou Jonathan	NANO	Performance Stock Units	A - Award	D			11,580		11,580
2018-03-07	2018-03-05	4	Chou Jonathan	NANO	Common Stock	A - Award	D			34,741			34,741
2018-03-06	2018-03-05	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		26.5200	-10,000	-265		342,087
2018-03-06	2018-03-02	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		26.4400	-10,000	-264		352,087
2018-02-27	2018-02-23	4	Taylor Janet Therese	NANO	Common Stock	A - Award	D			16,482			49,873
2018-02-27	2018-02-23	4	Kocher Rollin	NANO	Performance Stock Unit	A - Award	D			-7,270		7,270
2018-02-27	2018-02-23	4	Kocher Rollin	NANO	Common Stock	A - Award	D			19,391			45,915
2018-02-27	2018-02-23	4	Heidrich Kevin	NANO	Common Stock	A - Award	D			12,604			43,648
2018-02-26	2018-02-23	4	Stultz Timothy J	NANO	Performance Stock Unit	M - Exercise	D			-20,000		10,667
2018-02-26	2018-02-23	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			20,000			362,087
2018-02-26	2018-02-22	4	Stultz Timothy J	NANO	Performance Stock Units	M - Exercise	D			-22,500		22,500
2018-02-26	2018-02-22	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			22,500			342,087
2018-02-26	2018-02-23	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		26.4900	-1,210	-32		31,044
2018-02-26	2018-02-22	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		26.3000	-1,336	-35		32,254
2018-02-26	2018-02-22	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		26.3000	-1,133	-30		33,391
2018-02-26	2018-02-22	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	15.74		-3,333		0
2018-02-26	2018-02-22	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		26.7600	-3,333	-89		735,161
2018-02-26	2018-02-22	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		15.7400	3,333	52		738,494
2018-02-12	2018-02-08	4	Kocher Rollin	NANO	Performance Stock Unit	M - Exercise	D			-617		3,900
2018-02-12	2018-02-08	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		24.5400	-1,807	-44		26,524
2018-02-12	2018-02-08	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D			617			28,331
2018-02-12	2018-02-08	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		24.5400	-1,654	-41		34,524
2018-02-12	2018-02-08	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		24.5400	-1,492	-37		33,590
2018-02-12	2018-02-08	4	Stultz Timothy J	NANO	Performance Stock Units	M - Exercise	D			-4,195		26,500
2018-02-12	2018-02-08	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			4,195			319,587
2018-01-03	2018-01-02	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		24.9300	-339	-8		27,714
2018-01-03	2018-01-02	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		24.9300	-276	-7		36,934
2017-12-21	2017-12-20	4	Rhine Bruce C	NANO	Common Stock	G - Gift	D			-200			735,161
2017-12-11	2017-12-08	4	Rhine Bruce C	NANO	Common Stock	G - Gift	D			-600			735,361
2017-12-06		3	Swyt Greg	NANO	Common Stock		D						21,456
2017-12-06		3	Swyt Greg	NANO	Common Stock		D						21,456
2017-12-04	2017-12-01	4	Rhine Bruce C	NANO	Common Stock	G - Gift	D			-600			735,961
2017-11-28	2017-11-27	4	Lesaicherre Pierre-Yves	NANO	Performance Stock Units	A - Award	D			62,500		62,500
2017-11-28	2017-11-27	4	Lesaicherre Pierre-Yves	NANO	Common Stock	A - Award	D			59,480			59,480
2017-11-28	2017-11-27	4	Stultz Timothy J	NANO	Performance Stock Units	M - Exercise	D			-26,500		13,250
2017-11-28	2017-11-27	4	Stultz Timothy J	NANO	Performance Stock Units	M - Exercise	D			-22,500		22,500
2017-11-28	2017-11-27	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			2,075			315,392
2017-11-28	2017-11-27	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			17,666			313,317
2017-11-28	2017-11-27	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			15,000			295,651
2017-11-14	2017-11-14	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-14,166		0
2017-11-14	2017-11-14	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		26.4900	-400	-11		280,651
2017-11-14	2017-11-14	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		25.9100	-13,766	-357		281,051
2017-11-14	2017-11-14	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	14,166	161		294,817
2017-10-11	2017-10-10	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-20,000		14,166
2017-10-11	2017-10-10	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.1500	-20,000	-563		280,651
2017-10-11	2017-10-10	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	20,000	227		300,651
2017-09-26	2017-09-22	4	Andreson Jeff	NANO	Common Stock	S - Sale	D		27.1100	-7,233	-196		71,919
2017-09-13	2017-09-12	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-20,000		34,166
2017-09-13	2017-09-12	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		26.1700	-20,000	-523		280,651
2017-09-13	2017-09-12	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	20,000	227		300,651
2017-08-29	2017-08-28	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		25.6500	-2,505	-64		35,833
2017-08-09	2017-08-08	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-20,000		54,166
2017-08-09	2017-08-08	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		25.1900	-20,000	-504		280,651
2017-08-09	2017-08-08	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	20,000	227		300,651
2017-07-12	2017-07-11	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-20,000		74,166
2017-07-12	2017-07-11	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		26.3000	-20,000	-526		280,651
2017-07-12	2017-07-11	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	20,000	227		300,651
2017-07-05	2017-07-03	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		25.2500	-655	-17		38,338
2017-07-05	2017-07-03	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		25.2500	-661	-17		27,714
2017-07-05	2017-07-03	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		25.2500	-724	-18		36,934
2017-06-14	2017-06-13	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-20,000		94,166
2017-06-14	2017-06-13	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		26.9300	-20,000	-539		280,651
2017-06-14	2017-06-13	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	20,000	227		300,651
2017-06-09	2017-06-08	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		29.4700	-10,000	-295		736,561
2017-06-07	2017-05-29	4/A	Kocher Rollin	NANO	Common Stock	S - Sale	D		27.9700	-650	-18		27,714
2017-06-06	2017-06-02	4	Stultz Timothy J	NANO	Common Stock	G - Gift	D			-1,000			280,651
2017-05-31	2017-05-29	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		27.9700	-998	-28		27,366
2017-05-31	2017-05-27	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		27.9700	-1,183	-33		28,364
2017-05-25	2017-05-23	4	TSINGOS CHRISTINE A	NANO	Common Stock	A - Award	D			3,453			22,334
2017-05-25	2017-05-23	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			3,453			95,478
2017-05-25	2017-05-23	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			3,453			29,264
2017-05-25	2017-05-23	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			3,453			746,561
2017-05-25	2017-05-23	4	SEAMS CHRISTOPHER A	NANO	Common Stock	A - Award	D			3,453			15,054
2017-05-25	2017-05-23	4	DEUSTER ROBERT G	NANO	Common Stock	A - Award	D			3,453			4,301
2017-05-22	2017-05-19	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		27.1500	-969	-26		34,707
2017-05-22	2017-05-19	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		27.1500	-751	-20		36,934
2017-05-09	2017-05-05	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		28.8300	-10,000	-288		743,108
2017-04-28	2017-04-27	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	15.74		-3,333		0
2017-04-28	2017-04-27	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	14.80		-3,655		0
2017-04-28	2017-04-27	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		15.7400	3,333	52		92,025
2017-04-28	2017-04-27	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		14.8000	3,655	54		88,692
2017-03-28	2017-03-28	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		30.0000	-4,336	-130		35,676
2017-03-22	2017-03-21	4	Kocher Rollin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-313		0
2017-03-22	2017-03-21	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		29.1100	-313	-9		29,547
2017-03-22	2017-03-21	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D		14.3400	313	4		29,860
2017-03-22	2017-03-21	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		30.0000	-475	-14		40,012
2017-03-07	2017-02-24	4/A	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.4100	-15,305	-435		296,435
2017-03-07	2017-03-06	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		28.1400	-14,784	-416		281,651
2017-03-03	2017-03-02	4	DEUSTER ROBERT G	NANO	Common Stock	A - Award	D			848			848
2017-02-28	2017-02-24	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D			-1,090			40,487
2017-02-28	2017-02-24	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D			-1,127			37,685
2017-02-28	2017-02-24	4	Andreson Jeff	NANO	Common Stock	S - Sale	D			-1,252			78,746
2017-02-28	2017-02-24	4	Stultz Timothy J	NANO	Performance Stock Units	M - Exercise	D			-16,000		30,667
2017-02-28	2017-02-24	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D			-15,305			296,435
2017-02-28	2017-02-24	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			16,000			311,740
2017-02-23	2017-02-22	4	Stultz Timothy J	NANO	Performance Stock Units	M - Exercise	D			-22,500		45,000
2017-02-23	2017-02-22	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		27.9400	-14,419	-403		295,740
2017-02-23	2017-02-22	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			22,500			310,159
2017-02-23	2017-02-22	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		27.9400	-3,280	-92		38,812
2017-02-23	2017-02-22	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		27.9400	-1,212	-34		41,577
2017-02-23	2017-02-22	4	Andreson Jeff	NANO	Common Stock	S - Sale	D		27.9400	-3,520	-98		79,998
2017-02-23	2017-02-22	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		27.9400	-1,432	-40		38,338
2017-02-22	2017-02-21	4	Heidrich Kevin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	12.98		-5,000		0
2017-02-22	2017-02-21	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		28.0000	-5,000	-140		42,789
2017-02-22	2017-02-21	4	Heidrich Kevin	NANO	Common Stock	M - Exercise	D		12.9800	5,000	65		47,789
2017-02-22	2017-02-21	4	Kocher Rollin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-312		313
2017-02-22	2017-02-21	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		27.9700	-4,482	-125		29,547
2017-02-22	2017-02-21	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D		14.3400	312	4		34,029
2017-02-15	2017-02-14	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-208		209
2017-02-15	2017-02-14	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		26.1100	-208	-5		42,092
2017-02-15	2017-02-14	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	208	3		42,300
2017-02-10	2017-02-08	4	Stultz Timothy J	NANO	Performance Stock Units	A - Award	D			39,750		39,750
2017-02-10	2017-02-08	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			26,500			287,659
2017-02-10	2017-02-08	4	Andreson Jeff	NANO	Performance Stock Units	A - Award	D			8,100		8,100
2017-02-10	2017-02-08	4	Andreson Jeff	NANO	Common Stock	A - Award	D			16,200			83,518
2017-02-10	2017-02-08	4	Taylor Janet Therese	NANO	Common Stock	A - Award	D			12,275			39,770
2017-02-10	2017-02-08	4	Borowicz Stanislaw M.	NANO	Performance Stock Units	A - Award	D			5,850		5,850
2017-02-10	2017-02-08	4	Borowicz Stanislaw M.	NANO	Common Stock	A - Award	D			11,800			42,092
2017-02-10	2017-02-08	4	Heidrich Kevin	NANO	Common Stock	A - Award	D			9,810			42,789
2017-02-10	2017-02-08	4	Kocher Rollin	NANO	Performance Stock Units	A - Award	D			5,850		5,850
2017-02-10	2017-02-08	4	Kocher Rollin	NANO	Common Stock	A - Award	D			11,800			33,717
2017-01-27	2017-01-03	4/A	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		25.0600	-434	-11		27,495
2017-01-27	2017-01-04	4/A	Kocher Rollin	NANO	Common Stock	S - Sale	D		24.9600	-449	-11		21,917
2017-01-24	2017-01-23	4	Kocher Rollin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-313		625
2017-01-24	2017-01-23	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		25.1700	-313	-8		21,468
2017-01-24	2017-01-23	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D		14.3400	313	4		21,781
2017-01-20	2017-01-19	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		26.0000	-7,588	-197		32,505
2017-01-19	2017-01-19	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		26.5000	-8,327	-221		30,292
2017-01-18	2017-01-17	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-208		417
2017-01-18	2017-01-17	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		25.4700	-208	-5		38,619
2017-01-18	2017-01-17	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	208	3		38,827
2017-01-05	2017-01-04	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		24.9600	-449	-11		21,468
2017-01-04	2017-01-03	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		25.0600	-434	-11		27,061
2016-12-29	2016-12-28	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		26.0000	-326	-8		40,093
2016-12-22	2016-12-21	4	Kocher Rollin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-1,562		938
2016-12-22	2016-12-21	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		25.7900	-1,562	-40		21,917
2016-12-22	2016-12-21	4	Kocher Rollin	NANO	Common Stock	M - Exercise	D		14.3400	1,562	22		23,479
2016-12-15	2016-12-14	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-209		625
2016-12-15	2016-12-14	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		24.7800	-209	-5		38,619
2016-12-15	2016-12-14	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	209	3		38,828
2016-12-15	2016-12-15	4	Rhine Bruce C	NANO	Common Stock	G - Gift	D			-1,000			753,108
2016-12-13	2016-12-12	4	Kocher Rollin	NANO	Common Stock	S - Sale	D		24.4900	-1,642	-40		21,917
2016-11-30	2016-11-29	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.17		-2,038		0
2016-11-30	2016-11-29	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	10.83		-5,040		0
2016-11-30	2016-11-29	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		24.5800	-7,078	-174		754,108
2016-11-30	2016-11-29	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		24.4000	-30,000	-732		761,186
2016-11-30	2016-11-29	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		11.1700	2,038	23		791,186
2016-11-30	2016-11-29	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		10.8300	5,040	55		789,148
2016-11-23	2016-11-22	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		25.5000	-4,184	-107		38,619
2016-11-23	2016-11-22	4	Heidrich Kevin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	16.70		-30,000		0
2016-11-23	2016-11-22	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		25.0000	-30,000	-750		40,419
2016-11-23	2016-11-22	4	Heidrich Kevin	NANO	Common Stock	M - Exercise	D		16.7000	30,000	501		70,419
2016-11-15	2016-11-14	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-208		834
2016-11-15	2016-11-14	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		23.6000	-208	-5		42,803
2016-11-15	2016-11-14	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	208	3		43,011
2016-11-09	2016-11-07	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		22.0000	-3,083	-68		40,419
2016-10-31	2016-10-28	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-208		1,042
2016-10-31	2016-10-28	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		22.0000	-208	-5		42,803
2016-10-31	2016-10-28	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	208	3		43,011
2016-10-19	2016-10-17	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	10.83		-5,040		0
2016-10-19	2016-10-17	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.17		-2,038		0
2016-10-19	2016-10-17	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		10.8300	5,040	55		78,544
2016-10-19	2016-10-17	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		11.1700	2,038	23		73,504
2016-10-18	2016-10-17	4	Heidrich Kevin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	10.46		-7,000		0
2016-10-18	2016-10-17	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		19.7200	-7,000	-138		43,502
2016-10-18	2016-10-17	4	Heidrich Kevin	NANO	Common Stock	M - Exercise	D		10.4600	7,000	73		50,502
2016-10-04	2016-10-03	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		22.0800	-10,000	-221		784,108
2016-10-04	2016-09-07	4	Rhine Bruce C	NANO	Common Stock	W - Other	D			779			794,108
2016-09-26	2016-09-22	4	Andreson Jeff	NANO	Common Stock	S - Sale	D		22.5000	-5,010	-113		66,832
2016-09-26	2016-09-22	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-625		1,250
2016-09-26	2016-09-22	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		22.1000	-1,005	-22		42,803
2016-09-26	2016-09-22	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		21.7900	-625	-14		43,808
2016-09-26	2016-09-22	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	625	9		44,433
2016-09-23	2016-08-28	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		20.8900	-2,505	-52		27,495
2016-09-21		3	Kocher Rollin	NANO	Common Stock		D						47,118
2016-09-21		3	Kocher Rollin	NANO	Common Stock		D						47,118
2016-07-06	2016-07-01	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		20.5100	-10,000	-205		793,329
2016-07-06	2016-07-01	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		20.5200	-1,195	-25		43,808
2016-07-06	2016-07-01	4	Taylor Janet Therese	NANO	Common Stock	S - Sale	D		20.5200	-1,093	-22		30,000
2016-06-23	2016-06-21	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		20.0800	-10,000	-201		803,329
2016-06-17	2016-06-16	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-209		1,875
2016-06-17	2016-06-16	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		18.6800	-209	-4		43,808
2016-06-17	2016-06-16	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	209	3		44,017
2016-05-31	2016-05-27	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-416		2,084
2016-05-31	2016-05-27	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		18.3000	-416	-8		43,808
2016-05-31	2016-05-27	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	416	6		44,224
2016-05-31	2016-05-31	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	13.08		-45,834		0
2016-05-31	2016-05-31	4	Stultz Timothy J	NANO	Common Stock	D - Sale to Issuer	D		18.6200	-32,197	-600		261,159
2016-05-31	2016-05-31	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		13.0800	45,834	600		293,356
2016-05-26	2016-05-24	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			6,493			25,811
2016-05-26	2016-05-24	4	TSINGOS CHRISTINE A	NANO	Common Stock	A - Award	D			6,493			18,881
2016-05-26	2016-05-24	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			6,493			77,959
2016-05-26	2016-05-24	4	SEAMS CHRISTOPHER A	NANO	Common Stock	A - Award	D			6,493			11,601
2016-05-26	2016-05-24	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			6,493			813,329
2016-05-23	2016-05-19	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		17.1300	-969	-17		42,465
2016-05-23	2016-05-19	4	Borowicz Stanislaw M.	NANO	Common Stock	F - Taxes	D		17.1300	-752	-13		43,808
2016-05-04	2016-05-02	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	8.89		-5,164		0
2016-05-04	2016-05-02	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	8.89		-7,850		0
2016-05-04	2016-05-02	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.8500	-13,014	-232		806,836
2016-05-04	2016-05-02	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		8.8900	5,164	46		819,850
2016-05-04	2016-05-02	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		8.8900	7,850	70		814,686
2016-04-29	2016-04-27	4	Borowicz Stanislaw M.	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	14.34		-5,000		2,500
2016-04-29	2016-04-27	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		18.1500	-5,000	-91		44,560
2016-04-29	2016-04-27	4	Borowicz Stanislaw M.	NANO	Common Stock	M - Exercise	D		14.3400	5,000	72		49,560
2016-04-04	2016-04-01	4	Heidrich Kevin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.50		-20,000		0
2016-04-04	2016-04-01	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		15.4100	-20,000	-308		43,217
2016-04-04	2016-04-01	4	Heidrich Kevin	NANO	Common Stock	M - Exercise	D		7.5000	20,000	150		63,217
2016-03-24	2016-03-06	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		14.4900	-10,648	-154		247,522
2016-03-21	2016-03-15	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		13.8800	-969	-13		43,217
2016-03-16	2016-03-14	4	Borowicz Stanislaw M.	NANO	Common Stock	F - Taxes	D		14.2900	-1,754	-25		44,560
2016-03-15	2016-03-12	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		14.6300	-8,199	-120		258,170
2016-03-09	2012-02-13	4/A	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		6.6500	1,666	11		45,235
2016-03-09	2015-05-19	4/A	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			6,223			71,466
2016-02-24	2016-02-24	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		13.7000	-1,249	-17		44,186
2016-02-24	2016-02-22	4	Heidrich Kevin	NANO	Common Stock	A - Award	D			10,000			45,435
2016-02-24	2016-02-24	4	Stultz Timothy J	NANO	Performance Stock Unit	M - Exercise	D			-13,333		46,667
2016-02-24	2016-02-24	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		13.7000	-10,142	-139		266,369
2016-02-24	2016-02-24	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D			13,333			276,511
2016-02-24	2016-02-22	4	Stultz Timothy J	NANO	Performance Stock Unit	A - Award	D			67,500		67,500
2016-02-24	2016-02-22	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			45,000			263,178
2016-02-24	2016-02-24	4	Andreson Jeff	NANO	Common Stock	F - Taxes	D		13.7000	-1,459	-20		71,172
2016-02-24	2016-02-22	4	Andreson Jeff	NANO	Common Stock	A - Award	D			27,000			72,631
2016-02-24	2016-02-24	4	Borowicz Stanislaw M.	NANO	Common Stock	F - Taxes	D		13.7000	-1,313	-18		46,314
2016-02-24	2016-02-22	4	Borowicz Stanislaw M.	NANO	Common Stock	A - Award	D			25,000			47,627
2016-02-24	2016-02-22	4	Taylor Janet Therese	NANO	Common Stock	A - Award	D			10,000			30,000
2016-01-06	2016-01-04	4	Borowicz Stanislaw M.	NANO	Common Stock	S - Sale	D		14.7500	-526	-8		22,627
2015-09-24	2015-09-22	4	Andreson Jeff	NANO	Common Stock	F - Taxes	D		12.9300	-5,010	-65		44,990
2015-09-23	2015-09-21	4	Heidrich Kevin	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	2.38		-10,000		0
2015-09-23	2015-09-21	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		13.3100	-7,425	-99		34,831
2015-09-23	2015-09-21	4	Heidrich Kevin	NANO	Common Stock	S - Sale	D		13.3200	-10,000	-133		42,256
2015-09-23	2015-09-21	4	Heidrich Kevin	NANO	Common Stock	M - Exercise	D		2.3800	10,000	24		52,256
2015-09-01	2015-08-28	4	Taylor Janet Therese	NANO	Common Stock	A - Award	D			20,000			20,000
2015-09-01	2015-08-28	4	SEAMS CHRISTOPHER A	NANO	Common Stock	A - Award	D			5,108			5,108
2015-08-12	2015-08-11	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	0.98		-11,111		0
2015-08-12	2015-08-11	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		14.5355	-11,111	-162		218,178
2015-08-12	2015-08-11	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		0.9800	11,111	11		229,289
2015-05-20	2015-05-19	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			6,223			806,836
2015-05-20	2015-05-19	4	TSINGOS CHRISTINE A	NANO	Common Stock	A - Award	D			6,223			12,388
2015-05-20	2015-05-19	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			6,223			19,318
2015-05-20	2015-05-19	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			6,223			41,464
2015-05-20	2015-05-19	4	Heidrich Kevin	NANO	Common Stock	F - Taxes	D		15.6500	-969	-15		41,328
2015-05-20	2015-05-19	4	Borowicz Stanislaw M.	NANO	Common Stock	F - Taxes	D		15.6500	-751	-12		21,622
2015-05-20	2015-05-19	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	0.98		-11,112		11,111
2015-05-20	2015-05-19	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		15.7476	-11,112	-175		218,178
2015-05-20	2015-05-19	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		0.9800	11,112	11		229,290
2015-03-20	2014-12-22	5	Rhine Bruce C	NANO	Common Stock	G - Gift	D			-1,000			799,653
2015-03-20	2015-03-18	4	Stultz Timothy J	NANO	Performance Stock Unit	A - Award	D			60,000		60,000
2015-03-17	2015-03-14	4	Heidrich Kevin	NANO	Common Stock	D - Sale to Issuer	D		18.0600	-1,110	-20		42,297
2015-03-17	2015-03-14	4	Borowicz Stanislaw M.	NANO	Common Stock	F - Taxes	D		18.0600	-1,960	-35		22,373
2015-03-13	2015-03-12	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		17.9300	-9,550	-171		218,178
2015-03-10	2015-03-06	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		17.5500	-10,647	-187		227,728
2015-03-02	2015-02-24	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			40,000			238,375
2015-03-02	2015-02-24	4	Andreson Jeff	NANO	Common Stock	A - Award	D			10,000			50,000
2015-02-27	2015-02-24	4	Borowicz Stanislaw M.	NANO	Common Stock	A - Award	D			9,000			24,333
2015-02-27		3	Borowicz Stanislaw M.	NANO	Common Stock		D						30,666
2015-02-27		3	Borowicz Stanislaw M.	NANO	Common Stock		D						30,666
2015-02-26	2015-02-24	4	Heidrich Kevin	NANO	Common Stock	A - Award	D			9,000			43,407
2015-02-26		3	Heidrich Kevin	NANO	Common Stock		D						68,814
2015-02-26		3	Heidrich Kevin	NANO	Common Stock		D						68,814
2015-02-25	2015-02-23	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.00		-1,666		0
2015-02-25	2015-02-23	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.1000	-1,666	-28		800,613
2015-02-25	2015-02-23	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		6.0000	1,666	10		802,279
2015-02-19	2015-02-17	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	0.98		-11,111		22,223
2015-02-19	2015-02-17	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		17.3100	-2,687	-47		198,375
2015-02-19	2015-02-17	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		17.3000	-11,111	-192		201,062
2015-02-19	2015-02-17	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		0.9800	11,111	11		212,173
2015-02-17	2014-11-09	5	Andreson Jeff	NANO	Common Stock	A - Award	D			40,000			40,000
2015-01-06	2015-01-02	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.63		-2,500		0
2015-01-06	2015-01-02	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.3700	-2,500	-41		800,613
2015-01-06	2015-01-02	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		11.6300	2,500	29		803,113
2014-12-08	2014-11-26	4	Stultz Timothy J	NANO	Common Stock	G - Gift	D			-1,700			201,062
2014-11-03	2014-10-31	4	Egan Nancy E	NANO	Common Stock	F - Taxes	D		13.5400	-626	-8		26,590
2014-09-29	2014-09-25	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.65		-2,500		0
2014-09-29	2014-09-25	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		15.1416	-2,500	-38		800,613
2014-09-29	2014-09-25	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		6.6500	2,500	17		803,113
2014-08-19	2014-08-15	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.5000	-10,000	-165		800,613
2014-08-06	2014-08-04	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.63		-2,500		0
2014-08-06	2014-08-04	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		11.6300	2,500	29		35,241
2014-08-06	2014-08-06	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.6100	-10,000	-166		810,613
2014-08-06	2014-08-05	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.1500	-10,000	-162		820,613
2014-08-06	2014-08-04	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.0500	-10,000	-160		830,613
2014-07-01	2014-07-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-7,166		0
2014-07-01	2014-07-01	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.6500	-7,166	-134		202,762
2014-07-01	2014-07-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	7,166	53		209,928
2014-06-27	2014-06-26	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.71		-2,500		0
2014-06-27	2014-06-26	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.7450	-2,500	-44		840,613
2014-06-27	2014-06-26	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		2.7100	2,500	7		843,113
2014-06-02	2014-06-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-8,500		7,166
2014-06-02	2014-06-02	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		16.9700	-8,500	-144		202,762
2014-06-02	2014-06-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	8,500	62		211,262
2014-05-28	2014-05-23	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-5,416		10,834
2014-05-28	2014-05-23	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	15.85		-1,667		15,000
2014-05-28	2014-05-23	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.0000	-7,083	-120		52,998
2014-05-28	2014-05-23	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		11.3700	5,416	62		60,081
2014-05-28	2014-05-23	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		15.8500	1,667	26		54,665
2014-05-22	2014-05-20	4	TSINGOS CHRISTINE A	NANO	Common Stock	A - Award	D			6,165			6,165
2014-05-22	2014-05-20	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			6,165			32,741
2014-05-22	2014-05-20	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			6,165			840,613
2014-05-22	2014-05-20	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			6,165			13,095
2014-05-22	2014-05-20	4	NEWBERRY STEPHEN G	NANO	Common Stock	A - Award	D			6,165			17,588
2014-05-06	2014-05-05	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		16.0100	-7,843	-126		52,998
2014-05-01	2014-05-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-8,500		15,666
2014-05-01	2014-05-01	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		15.9000	-8,500	-135		202,762
2014-05-01	2014-05-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	8,500	62		211,262
2014-04-01	2014-04-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-8,500		24,166
2014-04-01	2014-04-01	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.2400	-8,500	-155		202,762
2014-04-01	2014-04-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	8,500	62		211,262
2014-03-31	2014-03-28	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.20		-2,500		0
2014-03-31	2014-03-28	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.8700	-2,500	-45		834,448
2014-03-31	2014-03-28	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		1.2000	2,500	3		836,948
2014-03-17	2014-03-14	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.28		-1,780		0
2014-03-17	2014-03-14	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.65		-2,500		0
2014-03-17	2014-03-14	4	BAIN HOWARD A III	NANO	Common Stock	S - Sale	D		18.2600	-4,280	-78		24,578
2014-03-17	2014-03-14	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		7.2800	1,780	13		28,858
2014-03-17	2014-03-14	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		6.6500	2,500	17		27,078
2014-03-17	2014-03-14	4	KISLING RONALD W	NANO	Common Stock	F - Taxes	D		18.3500	-926	-17		38,049
2014-03-12	2014-03-12	4	Egan Nancy E	NANO	Common Stock	F - Taxes	D		18.8600	-1,460	-28		27,216
2014-03-12	2014-03-12	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		18.8600	-7,516	-142		202,762
2014-03-12	2014-03-12	4	Crawford Bruce A	NANO	Common Stock	F - Taxes	D		18.8600	-2,423	-46		60,841
2014-03-12	2014-03-12	4	KISLING RONALD W	NANO	Common Stock	F - Taxes	D		18.8600	-1,679	-32		38,975
2014-03-10	2014-03-06	4	Crawford Bruce A	NANO	Common Stock	A - Award	D			30,000			63,264
2014-03-10	2014-03-06	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			85,000			210,278
2014-03-10	2014-03-06	4	KISLING RONALD W	NANO	Common Stock	A - Award	D			20,000			40,654
2014-03-10	2014-03-06	4	Egan Nancy E	NANO	Common Stock	A - Award	D			15,000			28,676
2014-03-04	2014-03-03	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-8,500		32,666
2014-03-04	2014-03-03	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.2100	-8,500	-155		125,278
2014-03-04	2014-03-03	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	8,500	62		133,778
2014-02-19	2014-02-17	4	KISLING RONALD W	NANO	Common Stock	F - Taxes	D		18.7000	-731	-14		20,654
2014-02-19	2014-02-17	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		18.7000	-2,480	-46		125,278
2014-02-19	2014-02-19	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	15.85		-3,333		16,667
2014-02-19	2014-02-19	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-560		16,250
2014-02-19	2014-02-19	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		18.4200	-3,893	-72		33,264
2014-02-19	2014-02-19	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		15.8500	3,333	53		37,157
2014-02-19	2014-02-19	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		11.3700	560	6		33,824
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-795		16,810
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	13.08		-12,500		0
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.50		-3,443		0
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	1.17		-1,667		0
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		18.5200	-26,278	-487		33,264
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		11.3700	795	9		59,542
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		13.0800	12,500	164		58,747
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		7.5000	3,443	26		46,247
2014-02-19	2014-02-18	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		1.1700	1,667	2		42,804
2014-02-19	2014-02-17	4	Crawford Bruce A	NANO	Common Stock	F - Taxes	D		18.7000	-1,388	-26		41,137
2014-02-19	2014-02-14	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		18.6300	-14,686	-274		42,525
2014-02-06	2014-02-05	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-8,500		41,166
2014-02-06	2014-02-05	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.6500	-300	-6		127,758
2014-02-06	2014-02-05	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		17.4100	-8,200	-143		128,058
2014-02-06	2014-02-05	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	8,500	62		136,258
2014-02-03	2014-02-03	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.2600	-800	-13		21,385
2014-01-29	2014-01-29	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		17.4900	-125	-2		22,185
2014-01-23	2014-01-22	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.2600	-125	-2		22,310
2014-01-15	2014-01-15	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.1200	-125	-2		22,435
2014-01-10	2014-01-09	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.65		-834		0
2014-01-10	2014-01-09	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.20		-834		0
2014-01-10	2014-01-09	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.71		-834		0
2014-01-10	2014-01-09	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		6.6500	834	6		26,576
2014-01-10	2014-01-09	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		2.7100	834	2		27,410
2014-01-10	2014-01-09	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		1.2000	834	1		28,244
2014-01-09	2014-01-08	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.2200	-125	-2		22,560
2014-01-09	2014-01-09	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.71		-2,500		0
2014-01-09	2014-01-09	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.20		-2,500		0
2014-01-09	2014-01-09	4	OLDHAM WILLIAM G	NANO	Common Stock	M - Exercise	D		1.2000	2,500	3		28,858
2014-01-09	2014-01-09	4	OLDHAM WILLIAM G	NANO	Common Stock	M - Exercise	D		2.7100	2,500	7		23,858
2014-01-03	2014-01-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-8,500		49,666
2014-01-03	2014-01-02	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.4300	-8,500	-157		127,758
2014-01-03	2014-01-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	8,500	62		136,258
2014-01-02	2013-12-31	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.8900	-125	-2		22,685
2013-12-31	2013-12-30	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.13		-2,500		0
2013-12-31	2013-12-30	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		18.5400	-2,500	-46		834,448
2013-12-31	2013-12-30	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		1.1300	2,500	3		836,948
2013-12-26	2013-12-24	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.3700	-125	-2		22,810
2013-12-19	2013-12-18	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.3000	-125	-2		22,935
2013-12-12	2013-12-11	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.9000	-5,000	-90		834,448
2013-12-12	2013-12-10	4	Stultz Timothy J	NANO	Common Stock	G - Gift	D			-2,800			127,758
2013-12-12	2013-12-11	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		17.9500	-125	-2		23,060
2013-12-05	2013-12-04	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		17.8800	-125	-2		23,185
2013-12-03	2013-12-03	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-4,292		58,166
2013-12-03	2013-12-03	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.0600	-4,292	-78		130,558
2013-12-03	2013-12-03	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	4,292	32		134,850
2013-12-03	2013-12-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	7.35		-4,208		62,458
2013-12-03	2013-12-02	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.3600	-4,208	-77		130,558
2013-12-03	2013-12-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	4,208	31		134,766
2013-11-27	2013-11-27	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.6700	-125	-2		23,310
2013-11-26	2013-11-26	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		18.5500	-5,000	-93		839,448
2013-11-25	2013-11-22	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		18.0000	-5,000	-90		844,448
2013-11-25	2013-11-21	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.8500	-5,000	-89		849,448
2013-11-22	2013-11-08	4/A	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	8.55		-25,000		0
2013-11-22	2013-11-08	4/A	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.9800	-25,000	-424		864,488
2013-11-22	2013-11-08	4/A	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		8.5500	25,000	214		889,488
2013-11-21	2013-11-20	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.71		-2,500		0
2013-11-21	2013-11-20	4	BAIN HOWARD A III	NANO	Common Stock	S - Sale	D		17.6300	-2,500	-44		24,578
2013-11-21	2013-11-20	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		2.7100	2,500	7		27,078
2013-11-21	2013-11-20	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		17.5000	-125	-2		23,435
2013-11-20	2013-11-19	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.5300	-10,000	-175		854,448
2013-11-13	2013-11-13	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		17.3200	-125	-2		23,560
2013-11-12	2013-11-08	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	15.98		-25,000		59,942
2013-11-12	2013-11-08	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		16.9800	-25,000	-424		864,488
2013-11-12	2013-11-08	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		15.9800	25,000	400		889,488
2013-11-07	2013-11-07	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.2000	-4,500	-77		57,211
2013-11-07	2013-11-07	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.3300	-4,000	-69		61,711
2013-11-07	2013-11-07	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.3600	-217	-4		65,711
2013-11-07	2013-11-07	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.2500	-2,783	-48		65,928
2013-11-07	2013-11-07	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.1800	-1,422	-24		68,711
2013-11-06	2013-11-06	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		17.7600	-125	-2		23,685
2013-11-06	2013-11-05	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.13		-2,500		0
2013-11-06	2013-11-05	4	OLDHAM WILLIAM G	NANO	Common Stock	M - Exercise	D		1.1300	2,500	3		23,858
2013-11-05	2013-11-04	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.28		-1,757		1,780
2013-11-05	2013-11-04	4	BAIN HOWARD A III	NANO	Common Stock	S - Sale	D		18.0000	-1,757	-32		24,578
2013-11-05	2013-11-04	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		7.2800	1,757	13		26,335
2013-11-05	2013-11-01	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.28		-3,130		3,537
2013-11-05	2013-11-01	4	BAIN HOWARD A III	NANO	Common Stock	S - Sale	D		18.0000	-3,130	-56		24,578
2013-11-05	2013-11-01	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		7.2800	3,130	23		27,708
2013-11-05	2013-11-04	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	M - Exercise	D	11.37		-47,395		17,605
2013-11-05	2013-11-04	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		17.5500	-47,395	-832		70,133
2013-11-05	2013-11-04	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		11.3700	47,395	539		117,528
2013-10-31	2013-10-31	4	Egan Nancy E	NANO	Common Stock	F - Taxes	D		18.5800	-626	-12		13,676
2013-10-30	2013-10-30	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		19.0000	-125	-2		23,810
2013-10-23	2013-10-23	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.9000	-125	-2		23,935
2013-10-16	2013-10-16	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.5800	-125	-2		24,060
2013-10-09	2013-10-09	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.1200	-125	-2		24,185
2013-10-02	2013-10-02	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.0300	-125	-2		24,310
2013-10-01	2013-09-30	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.11		-2,500		0
2013-10-01	2013-09-30	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		15.8700	-2,500	-40		864,488
2013-10-01	2013-09-30	4	Rhine Bruce C	NANO	Common Stock	M - Exercise	D		2.1100	2,500	5		866,988
2013-09-26	2013-09-25	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.0500	-125	-2		24,435
2013-09-18	2013-09-18	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		16.0200	-125	-2		24,560
2013-09-11	2013-09-11	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		15.4200	-125	-2		24,685
2013-09-05	2013-09-04	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		14.0500	-125	-2		24,810
2013-08-28	2013-08-28	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		14.0900	-125	-2		24,935
2013-08-21	2013-08-21	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		13.5500	-125	-2		25,060
2013-08-15	2013-08-14	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		14.2000	-125	-2		25,185
2013-08-08	2013-08-07	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		15.5900	-125	-2		25,310
2013-07-03	2013-07-02	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.20		-2,500		0
2013-07-03	2013-07-02	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		1.2000	2,500	3		24,578
2013-06-11	2013-06-10	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	14.80		-3,655		0
2013-06-11	2013-06-10	4	SMITH STEPHEN J	NANO	Common Stock	S - Sale	D		15.0000	-3,655	-55		12,148
2013-06-11	2013-06-10	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		14.8000	3,655	54		15,803
2013-05-29	2013-05-24	4	OLDHAM WILLIAM G	NANO	Common Stock	A - Award	D			6,930			21,358
2013-05-29	2013-05-24	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			6,930			29,078
2013-05-29	2013-05-24	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			6,930			864,488
2013-05-29	2013-05-24	4	NEWBERRY STEPHEN G	NANO	Common Stock	A - Award	D			6,930			11,423
2013-05-29	2013-05-24	4	BAIN HOWARD A III	NANO	Common Stock	A - Award	D			6,930			22,078
2013-05-29	2013-05-24	4	Brown Edward J Jr	NANO	Common Stock	A - Award	D			6,930			6,930
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	10.83		-5,040		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.63		-2,500		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.13		-2,500		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.17		-2,038		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.65		-2,500		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.71		-2,500		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.20		-2,500		0
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	S - Sale	D		14.3600	-19,578	-281		12,148
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		10.8300	5,040	55		31,726
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		11.6300	2,500	29		26,686
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		11.1700	2,038	23		24,186
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		6.6500	2,500	17		22,148
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		2.7100	2,500	7		19,648
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		1.2000	2,500	3		17,148
2013-05-16	2013-05-14	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		1.1300	2,500	3		14,648
2013-05-06	2013-05-06	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0700	-1,604	-23		5,822
2013-05-06	2013-05-03	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1800	-21,332	-302		7,426
2013-05-02	2013-05-02	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0200	-18,362	-257		28,758
2013-05-02	2013-05-01	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0400	-33,744	-474		47,120
2013-04-30	2013-04-30	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0300	-37,005	-519		80,864
2013-04-30	2013-04-29	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0400	-13,400	-188		117,869
2013-04-26	2013-04-26	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0100	-6,806	-95		131,269
2013-04-26	2013-04-25	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.2600	-22,856	-326		138,075
2013-04-24	2013-04-24	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1500	-8,538	-121		160,931
2013-04-24	2013-04-23	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1400	-30,419	-430		169,469
2013-04-17	2013-04-17	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0000	-1,100	-15		199,888
2013-04-17	2013-04-16	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0000	-2,100	-29		200,988
2013-04-15	2013-04-15	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0000	-2,050	-29		203,088
2013-04-15	2013-04-12	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0400	-17,016	-239		205,138
2013-04-11	2013-04-11	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1000	-28,220	-398		222,154
2013-04-11	2013-04-10	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1300	-35,193	-497		250,374
2013-04-09	2013-04-09	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0300	-19,930	-280		285,567
2013-04-09	2013-04-08	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0200	-22,247	-312		305,497
2013-04-08	2013-04-05	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0000	-4,800	-67		327,744
2013-04-08	2013-04-02	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1200	-3,600	-51		332,544
2013-04-01	2013-04-01	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1500	-8,687	-123		336,144
2013-04-01	2013-03-28	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.6300	-12,823	-188		344,831
2013-03-28	2013-03-27	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.7700	-9,467	-140		357,654
2013-03-28	2013-03-26	4	Coates Norman V	NANO	Common Stock	S - Sale	I		15.0100	-8,137	-122		367,121
2013-03-25	2013-03-25	4	Coates Norman V	NANO	Common Stock	S - Sale	I		15.0600	-10,312	-155		375,258
2013-03-25	2013-03-22	4	Coates Norman V	NANO	Common Stock	S - Sale	I		15.0900	-10,066	-152		385,570
2013-03-22	2013-03-21	4	Coates Norman V	NANO	Common Stock	S - Sale	I		15.1800	-22,587	-343		395,636
2013-03-22	2013-03-20	4	Coates Norman V	NANO	Common Stock	S - Sale	I		15.0500	-25,251	-380		418,223
2013-03-19	2013-03-19	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.9400	-15,032	-225		443,474
2013-03-19	2013-03-18	4	Coates Norman V	NANO	Common Stock	S - Sale	I		15.1100	-14,531	-220		458,506
2013-03-14	2013-03-12	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (Right to Buy)	A - Award	D	15.85		20,000		20,000
2013-03-14	2013-03-12	4	Crawford Bruce A	NANO	Common Stock	A - Award	D			20,000			70,133
2013-03-14	2013-03-12	4	KISLING RONALD W	NANO	Non-Qualified Stock Option (Right to Buy)	A - Award	D	15.85		13,000		13,000
2013-03-14	2013-03-12	4	KISLING RONALD W	NANO	Common Stock	A - Award	D			13,000			26,352
2013-03-14	2013-03-12	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (Right to Buy)	A - Award	D	15.85		60,000		60,000
2013-03-14	2013-03-12	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			60,000			130,558
2013-03-14	2013-03-14	4	KISLING RONALD W	NANO	Common Stock	F - Taxes	D		15.8900	-917	-15		25,435
2013-03-14	2013-03-12	4	Egan Nancy E	NANO	Non-Qualified Stock Option (Right to Buy)	A - Award	D	15.85		10,000		10,000
2013-03-14	2013-03-12	4	Egan Nancy E	NANO	Common Stock	A - Award	D			10,000			14,302
2013-02-20	2013-02-17	4	KISLING RONALD W	NANO	Common Stock	F - Taxes	D		14.6000	-731	-11		13,352
2013-02-20	2013-02-15	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.6400	-22,075	-323		473,037
2013-02-20	2013-02-14	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.8200	-17,580	-261		495,112
2013-02-20	2013-02-17	4	Crawford Bruce A	NANO	Common Stock	F - Taxes	D		14.6000	-1,424	-21		50,133
2013-02-20	2013-02-17	4	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		14.6000	-2,721	-40		70,558
2013-02-13	2013-02-13	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.7800	-20,071	-297		512,692
2013-02-13	2013-02-12	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.8200	-12,149	-180		532,763
2013-02-13	2013-02-11	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.7100	-14,339	-211		544,912
2013-02-12	2012-11-17	5	Crawford Bruce A	NANO	Common Stock	F - Taxes	D		13.7700	-1,181	-16		51,557
2013-02-12	2011-11-17	5	Crawford Bruce A	NANO	Common Stock	F - Taxes	D		17.3400	-1,514	-26		52,738
2013-02-12	2010-11-17	5	Crawford Bruce A	NANO	Common Stock	F - Taxes	D		11.3400	-1,181	-13		54,252
2013-02-12	2012-10-31	5	Egan Nancy E	NANO	Common Stock	F - Taxes	D		13.7600	-698	-10		4,302
2013-02-12	2012-03-14	5	KISLING RONALD W	NANO	Common Stock	F - Taxes	D		17.6500	-917	-16		14,083
2013-02-12	2012-11-17	5	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		13.7700	-2,445	-34		73,279
2013-02-12	2011-11-17	5	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		17.3400	-3,112	-54		75,724
2013-02-12	2010-11-17	5	Stultz Timothy J	NANO	Common Stock	F - Taxes	D		11.3400	-2,445	-28		78,836
2013-02-11	2013-02-08	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.8000	-11,195	-166		559,251
2013-02-11	2013-02-07	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.7800	-13,373	-198		570,446
2012-12-11	2012-12-07	4	Coates Norman V	NANO	Common Stock	S - Sale	D		14.6800	-1,985	-29		2,111
2012-12-06	2012-12-05	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.5800	-25,000	-364		583,819
2012-12-06	2012-12-04	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.5800	-25,000	-364		608,819
2012-12-03	2012-12-03	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.4800	-25,000	-362		633,819
2012-12-03	2012-11-30	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.4800	-25,000	-362		658,819
2012-12-03	2012-11-29	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.4600	-25,000	-362		683,819
2012-11-28	2012-11-28	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.2700	-25,000	-357		708,819
2012-11-28	2012-11-27	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.2700	-25,000	-357		733,819
2012-11-28	2012-11-26	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1800	-25,000	-354		758,819
2012-11-26	2012-11-23	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.1500	-25,000	-354		783,819
2012-11-26	2012-11-21	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0000	-25,000	-350		808,819
2012-11-20	2012-11-20	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.11		-834		0
2012-11-20	2012-11-20	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.28		-834		0
2012-11-20	2012-11-20	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	5.76		-834		0
2012-11-20	2012-11-20	4	OLDHAM WILLIAM G	NANO	Common Stock	M - Exercise	D		2.1100	834	2		14,428
2012-11-20	2012-11-20	4	OLDHAM WILLIAM G	NANO	Common Stock	M - Exercise	D		5.7600	834	5		13,594
2012-11-20	2012-11-20	4	OLDHAM WILLIAM G	NANO	Common Stock	M - Exercise	D		7.2800	834	6		12,760
2012-11-20	2012-11-20	4	Coates Norman V	NANO	Common Stock	S - Sale	I		13.9300	-25,000	-348		833,819
2012-11-20	2012-11-19	4	Coates Norman V	NANO	Common Stock	S - Sale	I		13.9200	-7,203	-100		858,819
2012-11-15	2012-11-15	4	Coates Norman V	NANO	Common Stock	S - Sale	I		13.9100	-1,661	-23		866,022
2012-11-15	2012-11-13	4	Coates Norman V	NANO	Common Stock	S - Sale	I		13.9300	-24,922	-347		867,683
2012-11-13	2012-11-12	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0100	-3,486	-49		892,605
2012-11-13	2012-11-09	4	Coates Norman V	NANO	Common Stock	S - Sale	I		14.0100	-11,369	-159		896,091
2012-11-13	2012-11-08	4	Coates Norman V	NANO	Common Stock	S - Sale	I		13.9300	-25,000	-348		907,460
2012-11-07	2012-11-05	4	Coates Norman V	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	5.81		-6,667		0
2012-11-07	2012-11-05	4	Coates Norman V	NANO	Common Stock	S - Sale	D		14.1800	-6,667	-95		4,096
2012-11-07	2012-11-05	4	Coates Norman V	NANO	Common Stock	M - Exercise	D		5.8100	6,667	39		10,763
2012-07-03	2012-07-02	4	Egan Nancy E	NANO	Common Stock	S - Sale	D		15.1800	-860	-13		5,000
2012-07-03	2012-07-02	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		15.1800	-597	-9		15,000
2012-05-29	2012-05-24	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		-3,655		3,655
2012-05-29	2012-05-24	4	BAIN HOWARD A III	NANO	Common Stock	A - Award	D			2,111			15,148
2012-05-29	2012-05-24	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		-3,655		3,655
2012-05-29	2012-05-24	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			2,111			22,148
2012-05-29	2012-05-24	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		3,655		3,655
2012-05-29	2012-05-24	4	SMITH STEPHEN J	NANO	Common Stock	A - Award	D			2,111			12,148
2012-05-29	2012-05-24	4	NEWBERRY STEPHEN G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		3,655		3,655
2012-05-29	2012-05-24	4	NEWBERRY STEPHEN G	NANO	Common Stock	A - Award	D			2,111			4,493
2012-05-29	2012-05-24	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		3,655		3,655
2012-05-29	2012-05-24	4	OLDHAM WILLIAM G	NANO	Common Stock	A - Award	D			2,111			11,926
2012-05-29	2012-05-24	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		3,655		3,655
2012-05-29	2012-05-24	4	Rhine Bruce C	NANO	Common Stock	A - Award	D			2,111			857,558
2012-05-29	2012-05-24	4	Coates Norman V	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	14.80		-3,655		3,655
2012-05-29	2012-05-24	4	Coates Norman V	NANO	Common Stock	A - Award	D			2,111			4,096
2012-04-17	2009-03-31	4/A	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.20		2,500		2,500
2012-04-17	2009-03-31	4/A	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.20		2,500		2,500
2012-04-17	2008-12-30	4/A	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.13		2,500		2,500
2012-04-17	2008-12-30	4/A	BAIN HOWARD A III	NANO	Common Stock	A - Award	D			2,000			11,300
2012-04-17	2008-09-30	4/A	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.11		-2,500		2,500
2012-04-17	2009-09-29	4/A	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.65		2,500		2,500
2012-04-17	2009-06-30	4/A	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.71		2,500		2,500
2012-04-17	2009-06-30	4/A	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.71		2,500		2,500
2012-04-17	2009-09-29	4/A	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.65		2,500		2,500
2012-04-17	2008-09-30	4/A	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.11		2,500		2,500
2012-04-17	2009-09-29	4/A	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.65		2,500		2,500
2012-04-17	2008-09-30	4/A	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.11		2,500		2,500
2012-04-17	2009-06-30	4/A	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.71		2,500		2,500
2012-04-17	2008-12-30	4/A	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.13		2,500		2,500
2012-04-17	2008-12-30	4/A	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			2,000			4,000
2012-04-17	2009-03-31	4/A	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.20		2,500		2,500
2012-04-17	2009-03-31	4/A	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.20		2,500		2,500
2012-04-17	2009-06-30	4/A	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.71		2,500		2,500
2012-04-17	2009-09-29	4/A	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.65		2,500		2,500
2012-04-17	2008-09-30	4/A	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.11		2,500		2,500
2012-04-17	2009-01-06	4/A	OLDHAM WILLIAM G	NANO	Common Stock	S - Sale	D		1.4000	-222	-0		3,778
2012-04-17	2008-12-30	4/A	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.13		2,500		2,500
2012-04-17	2008-12-30	4/A	OLDHAM WILLIAM G	NANO	Common Stock	A - Award	D			2,000			4,000
2012-04-17	2008-12-30	4/A	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.13		2,500		2,500
2012-04-17	2008-12-30	4/A	SMITH STEPHEN J	NANO	Common Stock	A - Award	D			2,000			4,000
2012-04-17	2009-03-31	4/A	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.20		2,500		2,500
2012-04-17	2009-09-29	4/A	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.65		2,500		2,500
2012-04-17	2008-09-30	4/A	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.11		2,500		2,500
2012-04-17	2009-06-30	4/A	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	2.71		2,500		2,500
2012-04-17	2008-12-30	4/A	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.13		2,500		2,500
2012-04-17	2008-12-30	4/A	Rhine Bruce C	NANO	Common Stock	A - Award	D			2,000			920,810
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	13.08		-2,083		45,834
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.37		-2,917		114,166
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.35		-6,667		66,666
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	0.98		-3,333		33,334
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.4748	-15,000	-277		77,987
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		13.0800	2,083	27		92,987
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	2,917	33		90,904
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	6,667	49		87,987
2012-04-04	2012-04-02	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		0.9800	3,333	3		81,320
2012-03-22	2012-03-20	4	Coates Norman V	NANO	Common Stock	S - Sale	I		18.1552	-25,000	-454		932,460
2012-03-14	2012-03-13	4	Rhine Bruce C	NANO	Common Stock	S - Sale	D		17.4351	-20,000	-349		855,447
2012-03-07	2012-03-05	4	Coates Norman V	NANO	Common Stock	S - Sale	I		17.0575	-25,000	-426		957,460
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	13.08		-2,083		47,917
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	11.37		-2,917		117,083
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.35		-6,667		73,333
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	0.98		-3,333		36,667
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		18.1758	-15,000	-273		77,987
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		13.0800	2,083	27		92,987
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		11.3700	2,917	33		90,904
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	6,667	49		87,987
2012-03-05	2012-03-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		0.9800	3,333	3		81,320
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.65		-1,666		834
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.20		-1,666		834
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.71		-1,666		834
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.13		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.61		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.11		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	5.76		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.28		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	9.93		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	9.58		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.83		-2,500		0
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	S - Sale	D		19.7000	-24,998	-492		20,037
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		6.6500	1,666	11		45,235
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		2.7100	1,666	5		43,569
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		1.2000	1,666	2		41,903
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		1.1300	2,500	3		40,237
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		2.1100	2,500	5		37,737
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		5.7600	2,500	14		35,237
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		7.2800	2,500	18		32,737
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		9.9300	2,500	25		30,237
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		9.5800	2,500	24		27,737
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		6.8300	2,500	17		25,237
2012-02-23	2012-02-13	4	BENTLEY J THOMAS	NANO	Common Stock	M - Exercise	D		6.6100	2,500	17		22,737
2012-02-22	2012-02-17	4	KISLING RONALD W	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	19.03		12,500		12,500
2012-02-22	2012-02-17	4	KISLING RONALD W	NANO	Common Stock	A - Award	D			5,000			15,000
2012-02-22	2012-02-17	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	19.03		50,000		50,000
2012-02-22	2012-02-17	4	Stultz Timothy J	NANO	Common Stock	A - Award	D			20,000			77,987
2012-02-22	2012-02-21	4	Coates Norman V	NANO	Common Stock	S - Sale	I		18.5620	-25,000	-464		982,460
2012-02-22	2012-02-17	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	19.03		25,000		25,000
2012-02-22	2012-02-17	4	Crawford Bruce A	NANO	Common Stock	A - Award	D			10,000			42,701
2012-02-16	2012-02-14	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	2.11		-834		0
2012-02-16	2012-02-14	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.13		-2,166		0
2012-02-16	2012-02-14	4	BAIN HOWARD A III	NANO	Common Stock	S - Sale	D		19.5001	-3,000	-59		13,037
2012-02-16	2012-02-14	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		2.1100	834	2		16,037
2012-02-16	2012-02-14	4	BAIN HOWARD A III	NANO	Common Stock	M - Exercise	D		1.1300	2,166	2		15,203
2012-02-07	2012-02-06	4	Coates Norman V	NANO	Common Stock	S - Sale	I		20.4273	-25,000	-511		1,007,460
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.88		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.61		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	5.76		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.28		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	9.93		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	9.58		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	6.83		-2,500		0
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	S - Sale	D		19.7477	-17,500	-346		10,037
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		1.8800	2,500	5		27,537
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		5.7600	2,500	14		25,037
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		7.2800	2,500	18		22,537
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		9.9300	2,500	25		20,037
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		9.5800	2,500	24		17,537
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		6.8300	2,500	17		15,037
2012-01-30	2012-01-26	4	SMITH STEPHEN J	NANO	Common Stock	M - Exercise	D		6.6100	2,500	17		12,537
2012-01-24	2012-01-20	4	Coates Norman V	NANO	Common Stock	S - Sale	I		18.2861	-25,000	-457		1,032,460
2012-01-06	2012-01-05	4	Coates Norman V	NANO	Common Stock	S - Sale	I		18.0244	-25,000	-451		1,057,460
2012-01-05	2012-01-03	4	KISLING RONALD W	NANO	Common Stock	S - Sale	D		18.5600	-515	-10		10,000
2011-05-31	2011-05-26	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	15.74		3,333		3,333
2011-05-31	2011-05-26	4	OLDHAM WILLIAM G	NANO	Common Stock	A - Award	D			1,985			9,815
2011-05-31	2011-05-26	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	15.74		3,333		3,333
2011-05-31	2011-05-26	4	BAIN HOWARD A III	NANO	Common Stock	A - Award	D			1,985			13,037
2011-05-31	2011-05-26	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	15.74		3,333		3,333
2011-05-31	2011-05-26	4	BENTLEY J THOMAS	NANO	Common Stock	A - Award	D			1,985			20,037
2011-05-31	2011-05-26	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	15.74		3,333		3,333
2011-05-31	2011-05-26	4	SMITH STEPHEN J	NANO	Common Stock	A - Award	D			1,985			10,037
2011-05-18	2011-05-16	4	Rhine Bruce C By spouse	NANO	Common Stock	S - Sale	I		15.4830	-1,429	-22		1,428
2011-04-21		3	Vincent J Coates Separate Property Trust	NANO	Common Stock		I						3,501,511
2011-04-06	2011-04-05	4	Coates Norman V	NANO	Common Stock	S - Sale	I		17.6406	-25,000	-441		1,507,460
2011-04-04	2011-04-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.35		-10,000		150,000
2011-04-04	2011-04-01	4	Stultz Timothy J	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	0.98		-5,000		75,000
2011-04-04	2011-04-01	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		17.9816	-10,000	-180		57,987
2011-04-04	2011-04-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		7.3500	10,000	74		67,987
2011-04-04	2011-04-01	4	Stultz Timothy J	NANO	Common Stock	S - Sale	D		17.9728	-5,000	-90		57,987
2011-04-04	2011-04-01	4	Stultz Timothy J	NANO	Common Stock	M - Exercise	D		0.9800	5,000	5		62,987
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	7.50		-230		4,131
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	1.17		-555		6,112
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Non-Qualified Stock Option (right to buy)	M - Exercise	D	0.98		-1,388		11,112
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Common Stock	S - Sale	D		16.9000	-2,173	-37		40,565
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		7.5000	230	2		42,738
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		1.1700	555	1		42,508
2011-03-29	2011-03-25	4	Crawford Bruce A	NANO	Common Stock	M - Exercise	D		0.9800	1,388	1		41,953
2010-04-16	2010-04-14	4	Coates Norman V	NANO	Common Stock	S - Sale	I		11.3100	-50,000	-566		2,632,460
2009-04-03	2009-04-02	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-04-03	2009-04-02	4	COATES VINCENT J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-04-03	2009-04-02	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-04-03	2009-04-02	4	WARD EDMOND R	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-04-03	2009-04-02	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-04-03	2009-04-02	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-04-03	2009-04-02	4	BAIN HOWARD A III	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	1.34		2,500		2,500
2009-03-12	2009-02-25	4/A	Crawford Bruce A	NANO	Non-qualified Stock Option (Right to buy)	A - Award	D	1.17		20,000		20,000
2008-04-03	2008-04-01	4	COATES VINCENT J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	7.30		2,500		2,500
2008-04-03	2008-04-01	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	7.30		2,500		2,500
2008-04-03		3	BAIN HOWARD A III	NANO	Common Stock		D						1,000
2008-04-03	2008-04-01	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	7.30		2,500		2,500
2008-04-03	2008-04-01	4	Dox Joseph F	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	7.30		2,500		2,500
2008-04-03	2008-04-01	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	7.30		2,500		2,500
2008-04-03	2008-04-01	4	WARD EDMOND R	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	7.30		2,500		2,500
2008-02-28	2008-02-26	4	Rhine Bruce C	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.00		1,666		1,666
2007-11-13	2007-11-08	4	Crawford Bruce A	NANO	Non-qualified Stock Option (Right to buy)	A - Award	D	6.25		6,250		6
2007-05-21		3	Dox Joseph F	NANO	Common Stock		D						701
2007-05-21		3	Dox Joseph F	NANO	Common Stock		I						1,221
2007-05-21		3	Dox Joseph F	NANO	Common Stock		I						311
2007-05-10	2007-05-09	4	COATES VINCENT J See footnore	NANO	Common Stock	P - Purchase	I		5.8800	100	1		3,457,686
2007-05-10	2007-05-09	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8700	2,500	15		3,457,586
2007-05-10	2007-05-09	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8600	900	5		3,455,086
2007-05-10	2007-05-09	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8500	17,300	101		3,454,186
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.9300	100	1		3,436,886
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.9100	2,200	13		3,436,786
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.9000	6,000	35		3,434,586
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8900	5,091	30		3,428,586
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8800	4,300	25		3,423,495
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8700	2,687	16		3,419,195
2007-05-10	2007-05-08	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8600	422	2		3,416,508
2007-05-10	2007-05-07	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		6.0000	20,800	125		3,416,086
2007-05-10	2007-05-04	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8600	5,019	29		3,395,286
2007-05-10	2007-05-04	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8200	9,800	57		3,390,267
2007-05-10	2007-05-04	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8100	1,513	9		3,380,467
2007-05-10	2007-05-04	4	COATES VINCENT J	NANO	Common Stock	P - Purchase	I		5.8000	2,800	16		3,378,954
2007-04-05	2007-04-03	4	BENTLEY J THOMAS	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.61		2,500		2,500
2007-04-05	2007-04-03	4	WARD EDMOND R	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.61		2,500		2,500
2007-04-05	2007-04-03	4	OLDHAM WILLIAM G	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.61		-2,500		2,500
2007-04-05	2007-04-03	4	SMITH STEPHEN J	NANO	Non-Qualified Stock Option (right to buy)	A - Award	D	6.61		2,500		2,500

非衍生或衍生證券的公開市場或私下買入

非衍生或衍生證券的公開市場或私下賣出

公司向內部人員授予、獎勵或以其他方式獲取證券（例如股票期權）

衍生工具轉換

將證券賣出或轉讓回公司

使用從公司收到的證券的一部分來支付行使價或稅務負擔。

內部人士贈送或接收他人贈送公司股票

股權掉期和類似的避險交易

行使或轉換從公司獲得的衍生證券（例如期權）

內部人士透過Form 4自願報告的一筆交易

其他（附有交易描述的腳註）

ONTO / Onto Innovation Inc. - Insider Trading and Ownership Report - SEC Form 3, 4, 5